6/29/2010	12:00:21 AM	Helium valve closed
6/29/2010	12:00:21 AM	PH3 valve closed
6/29/2010	12:00:21 AM	Main Vac valve closed
6/29/2010	12:00:21 AM	Bypass valve closed
6/29/2010	12:00:21 AM	H2 valve opened
6/29/2010	12:00:21 AM	BCl3 valve opened
6/29/2010	12:00:21 AM	SiCl4 pre valve opened
6/29/2010	12:00:21 AM	SiCl4 post valve opened
6/29/2010	12:00:21 AM	Bubbler valve opened
6/29/2010	12:00:21 AM	Helium MFC set to  0.000000
6/29/2010	12:00:21 AM	H2 MFC set to  500.000000
6/29/2010	12:00:21 AM	BCl3 MFC set to  35.000000
6/29/2010	12:00:21 AM	PHl3 MFC set to  0.000000
6/29/2010	12:00:21 AM	SiCl4 MFC set to  50.000000
6/29/2010	12:00:21 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	12:00:21 AM	Tube furnace set to 1000
6/29/2010	12:15:21 AM	H2 valve closed
6/29/2010	12:15:21 AM	BCl3 valve closed
6/29/2010	12:15:21 AM	PH3 valve closed
6/29/2010	12:15:21 AM	SiCl4 pre valve closed
6/29/2010	12:15:21 AM	SiCl4 post valve closed
6/29/2010	12:15:21 AM	Main Vac valve closed
6/29/2010	12:15:21 AM	Bypass valve closed
6/29/2010	12:15:21 AM	Helium valve opened
6/29/2010	12:15:21 AM	Bubbler valve opened
6/29/2010	12:15:21 AM	Helium MFC set to  500.000000
6/29/2010	12:15:21 AM	H2 MFC set to  0.000000
6/29/2010	12:15:21 AM	BCl3 MFC set to  0.000000
6/29/2010	12:15:21 AM	PHl3 MFC set to  0.000000
6/29/2010	12:15:21 AM	SiCl4 MFC set to  0.000000
6/29/2010	12:15:21 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	12:15:21 AM	Tube furnace set to 750
6/29/2010	12:35:21 AM	H2 valve closed
6/29/2010	12:35:21 AM	BCl3 valve closed
6/29/2010	12:35:21 AM	PH3 valve closed
6/29/2010	12:35:21 AM	SiCl4 pre valve closed
6/29/2010	12:35:21 AM	SiCl4 post valve closed
6/29/2010	12:35:21 AM	Main Vac valve closed
6/29/2010	12:35:21 AM	Bypass valve closed
6/29/2010	12:35:21 AM	Helium valve opened
6/29/2010	12:35:21 AM	Bubbler valve opened
6/29/2010	12:35:21 AM	Helium MFC set to  500.000000
6/29/2010	12:35:21 AM	H2 MFC set to  0.000000
6/29/2010	12:35:21 AM	BCl3 MFC set to  0.000000
6/29/2010	12:35:21 AM	PHl3 MFC set to  0.000000
6/29/2010	12:35:21 AM	SiCl4 MFC set to  0.000000
6/29/2010	12:35:21 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	12:35:21 AM	Tube furnace set to 0
6/29/2010	12:55:21 AM	Helium valve closed
6/29/2010	12:55:21 AM	H2 valve closed
6/29/2010	12:55:21 AM	BCl3 valve closed
6/29/2010	12:55:21 AM	PH3 valve closed
6/29/2010	12:55:21 AM	SiCl4 pre valve closed
6/29/2010	12:55:21 AM	SiCl4 post valve closed
6/29/2010	12:55:21 AM	Main Vac valve closed
6/29/2010	12:55:21 AM	Bypass valve closed
6/29/2010	12:55:21 AM	Bubbler valve closed
6/29/2010	12:55:21 AM	Helium MFC set to  0.000000
6/29/2010	12:55:21 AM	H2 MFC set to  0.000000
6/29/2010	12:55:21 AM	BCl3 MFC set to  0.000000
6/29/2010	12:55:21 AM	PHl3 MFC set to  0.000000
6/29/2010	12:55:21 AM	SiCl4 MFC set to  0.000000
6/29/2010	12:55:21 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	12:55:21 AM	Tube furnace set to 0
6/29/2010	12:55:22 AM	Run finished at 12:55 AM
6/29/2010	1:42:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2010	1:42:29 AM	Recipe started at 1:42 AM
6/29/2010	1:42:29 AM	H2 valve closed
6/29/2010	1:42:29 AM	BCl3 valve closed
6/29/2010	1:42:29 AM	PH3 valve closed
6/29/2010	1:42:29 AM	SiCl4 pre valve closed
6/29/2010	1:42:29 AM	SiCl4 post valve closed
6/29/2010	1:42:29 AM	Main Vac valve closed
6/29/2010	1:42:29 AM	Bypass valve closed
6/29/2010	1:42:29 AM	Bubbler valve closed
6/29/2010	1:42:29 AM	Helium valve opened
6/29/2010	1:42:29 AM	Helium MFC set to  500.000000
6/29/2010	1:42:29 AM	H2 MFC set to  0.000000
6/29/2010	1:42:29 AM	BCl3 MFC set to  0.000000
6/29/2010	1:42:29 AM	PHl3 MFC set to  0.000000
6/29/2010	1:42:29 AM	SiCl4 MFC set to  0.000000
6/29/2010	1:42:29 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	1:42:29 AM	Tube furnace set to 0
6/29/2010	1:42:31 AM	Helium valve closed
6/29/2010	1:42:31 AM	H2 valve closed
6/29/2010	1:42:31 AM	BCl3 valve closed
6/29/2010	1:42:31 AM	PH3 valve closed
6/29/2010	1:42:31 AM	SiCl4 pre valve closed
6/29/2010	1:42:31 AM	SiCl4 post valve closed
6/29/2010	1:42:31 AM	Main Vac valve closed
6/29/2010	1:42:31 AM	Bypass valve closed
6/29/2010	1:42:31 AM	Bubbler valve closed
6/29/2010	1:42:31 AM	Helium MFC set to  0.000000
6/29/2010	1:42:31 AM	H2 MFC set to  0.000000
6/29/2010	1:42:31 AM	BCl3 MFC set to  0.000000
6/29/2010	1:42:31 AM	PHl3 MFC set to  0.000000
6/29/2010	1:42:31 AM	SiCl4 MFC set to  0.000000
6/29/2010	1:42:31 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	1:42:32 AM	Tube furnace set to 0
6/29/2010	1:42:32 AM	Run finished at 1:42 AM
6/29/2010	1:42:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2010	2:04:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2010	2:04:31 AM	Recipe started at 2:04 AM
6/29/2010	2:04:31 AM	Helium valve closed
6/29/2010	2:04:31 AM	H2 valve closed
6/29/2010	2:04:31 AM	BCl3 valve closed
6/29/2010	2:04:31 AM	PH3 valve closed
6/29/2010	2:04:31 AM	SiCl4 pre valve closed
6/29/2010	2:04:31 AM	SiCl4 post valve closed
6/29/2010	2:04:31 AM	Main Vac valve closed
6/29/2010	2:04:31 AM	Bubbler valve closed
6/29/2010	2:04:31 AM	Bypass valve opened
6/29/2010	2:04:31 AM	Helium MFC set to  0.000000
6/29/2010	2:04:31 AM	H2 MFC set to  0.000000
6/29/2010	2:04:31 AM	BCl3 MFC set to  0.000000
6/29/2010	2:04:31 AM	PHl3 MFC set to  0.000000
6/29/2010	2:04:31 AM	SiCl4 MFC set to  0.000000
6/29/2010	2:04:31 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	2:04:31 AM	Tube furnace set to 0
6/29/2010	2:05:20 AM	Helium valve closed
6/29/2010	2:05:20 AM	H2 valve closed
6/29/2010	2:05:20 AM	BCl3 valve closed
6/29/2010	2:05:20 AM	PH3 valve closed
6/29/2010	2:05:20 AM	SiCl4 pre valve closed
6/29/2010	2:05:20 AM	SiCl4 post valve closed
6/29/2010	2:05:20 AM	Bubbler valve closed
6/29/2010	2:05:20 AM	Main Vac valve opened
6/29/2010	2:05:20 AM	Bypass valve opened
6/29/2010	2:05:20 AM	Helium MFC set to  0.000000
6/29/2010	2:05:20 AM	H2 MFC set to  0.000000
6/29/2010	2:05:20 AM	BCl3 MFC set to  0.000000
6/29/2010	2:05:20 AM	PHl3 MFC set to  0.000000
6/29/2010	2:05:20 AM	SiCl4 MFC set to  0.000000
6/29/2010	2:05:20 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	2:05:20 AM	Tube furnace set to 0
6/29/2010	2:05:20 AM	Run finished at 2:05 AM
6/29/2010	2:05:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2010	2:22:20 AM	Recipe started at 2:22 AM
6/29/2010	2:22:20 AM	Helium valve closed
6/29/2010	2:22:20 AM	H2 valve closed
6/29/2010	2:22:20 AM	BCl3 valve closed
6/29/2010	2:22:20 AM	PH3 valve closed
6/29/2010	2:22:20 AM	SiCl4 pre valve closed
6/29/2010	2:22:20 AM	SiCl4 post valve closed
6/29/2010	2:22:20 AM	Main Vac valve closed
6/29/2010	2:22:20 AM	Bubbler valve closed
6/29/2010	2:22:20 AM	Bypass valve opened
6/29/2010	2:22:20 AM	Helium MFC set to  0.000000
6/29/2010	2:22:20 AM	H2 MFC set to  0.000000
6/29/2010	2:22:20 AM	BCl3 MFC set to  0.000000
6/29/2010	2:22:20 AM	PHl3 MFC set to  0.000000
6/29/2010	2:22:20 AM	SiCl4 MFC set to  0.000000
6/29/2010	2:22:20 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	2:22:20 AM	Tube furnace set to 0
6/29/2010	2:22:20 AM	Helium valve closed
6/29/2010	2:22:20 AM	H2 valve closed
6/29/2010	2:22:20 AM	BCl3 valve closed
6/29/2010	2:22:20 AM	PH3 valve closed
6/29/2010	2:22:20 AM	SiCl4 pre valve closed
6/29/2010	2:22:20 AM	SiCl4 post valve closed
6/29/2010	2:22:20 AM	Bubbler valve closed
6/29/2010	2:22:20 AM	Main Vac valve opened
6/29/2010	2:22:20 AM	Bypass valve opened
6/29/2010	2:22:20 AM	Helium MFC set to  0.000000
6/29/2010	2:22:20 AM	H2 MFC set to  0.000000
6/29/2010	2:22:20 AM	BCl3 MFC set to  0.000000
6/29/2010	2:22:20 AM	PHl3 MFC set to  0.000000
6/29/2010	2:22:20 AM	SiCl4 MFC set to  0.000000
6/29/2010	2:22:20 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	2:22:20 AM	Tube furnace set to 0
6/29/2010	2:23:20 AM	H2 valve closed
6/29/2010	2:23:20 AM	BCl3 valve closed
6/29/2010	2:23:20 AM	PH3 valve closed
6/29/2010	2:23:21 AM	SiCl4 pre valve closed
6/29/2010	2:23:21 AM	SiCl4 post valve closed
6/29/2010	2:23:21 AM	Bubbler valve closed
6/29/2010	2:23:21 AM	Helium valve opened
6/29/2010	2:23:21 AM	Main Vac valve opened
6/29/2010	2:23:21 AM	Bypass valve opened
6/29/2010	2:23:21 AM	Helium MFC set to  100.000000
6/29/2010	2:23:21 AM	H2 MFC set to  0.000000
6/29/2010	2:23:21 AM	BCl3 MFC set to  0.000000
6/29/2010	2:23:21 AM	PHl3 MFC set to  0.000000
6/29/2010	2:23:21 AM	SiCl4 MFC set to  0.000000
6/29/2010	2:23:21 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	2:23:21 AM	Tube furnace set to 0
6/29/2010	2:32:21 AM	Helium valve closed
6/29/2010	2:32:21 AM	H2 valve closed
6/29/2010	2:32:21 AM	BCl3 valve closed
6/29/2010	2:32:21 AM	PH3 valve closed
6/29/2010	2:32:21 AM	SiCl4 pre valve closed
6/29/2010	2:32:21 AM	SiCl4 post valve closed
6/29/2010	2:32:21 AM	Bubbler valve closed
6/29/2010	2:32:21 AM	Main Vac valve opened
6/29/2010	2:32:21 AM	Bypass valve opened
6/29/2010	2:32:21 AM	Helium MFC set to  0.000000
6/29/2010	2:32:21 AM	H2 MFC set to  0.000000
6/29/2010	2:32:21 AM	BCl3 MFC set to  0.000000
6/29/2010	2:32:21 AM	PHl3 MFC set to  0.000000
6/29/2010	2:32:21 AM	SiCl4 MFC set to  0.000000
6/29/2010	2:32:21 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	2:32:21 AM	Tube furnace set to 0
6/29/2010	2:33:21 AM	H2 valve closed
6/29/2010	2:33:21 AM	BCl3 valve closed
6/29/2010	2:33:21 AM	PH3 valve closed
6/29/2010	2:33:21 AM	SiCl4 pre valve closed
6/29/2010	2:33:21 AM	SiCl4 post valve closed
6/29/2010	2:33:21 AM	Bubbler valve closed
6/29/2010	2:33:21 AM	Helium valve opened
6/29/2010	2:33:21 AM	Main Vac valve opened
6/29/2010	2:33:21 AM	Bypass valve opened
6/29/2010	2:33:21 AM	Helium MFC set to  100.000000
6/29/2010	2:33:21 AM	H2 MFC set to  0.000000
6/29/2010	2:33:21 AM	BCl3 MFC set to  0.000000
6/29/2010	2:33:21 AM	PHl3 MFC set to  0.000000
6/29/2010	2:33:21 AM	SiCl4 MFC set to  0.000000
6/29/2010	2:33:21 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	2:33:21 AM	Tube furnace set to 0
6/29/2010	2:42:21 AM	Helium valve closed
6/29/2010	2:42:21 AM	H2 valve closed
6/29/2010	2:42:21 AM	BCl3 valve closed
6/29/2010	2:42:21 AM	PH3 valve closed
6/29/2010	2:42:21 AM	SiCl4 pre valve closed
6/29/2010	2:42:21 AM	SiCl4 post valve closed
6/29/2010	2:42:21 AM	Bubbler valve closed
6/29/2010	2:42:21 AM	Main Vac valve opened
6/29/2010	2:42:21 AM	Bypass valve opened
6/29/2010	2:42:21 AM	Helium MFC set to  0.000000
6/29/2010	2:42:21 AM	H2 MFC set to  0.000000
6/29/2010	2:42:21 AM	BCl3 MFC set to  0.000000
6/29/2010	2:42:21 AM	PHl3 MFC set to  0.000000
6/29/2010	2:42:21 AM	SiCl4 MFC set to  0.000000
6/29/2010	2:42:21 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	2:42:21 AM	Tube furnace set to 0
6/29/2010	2:43:21 AM	H2 valve closed
6/29/2010	2:43:21 AM	BCl3 valve closed
6/29/2010	2:43:21 AM	PH3 valve closed
6/29/2010	2:43:21 AM	SiCl4 pre valve closed
6/29/2010	2:43:21 AM	SiCl4 post valve closed
6/29/2010	2:43:21 AM	Bubbler valve closed
6/29/2010	2:43:21 AM	Helium valve opened
6/29/2010	2:43:21 AM	Main Vac valve opened
6/29/2010	2:43:21 AM	Bypass valve opened
6/29/2010	2:43:21 AM	Helium MFC set to  100.000000
6/29/2010	2:43:21 AM	H2 MFC set to  0.000000
6/29/2010	2:43:21 AM	BCl3 MFC set to  0.000000
6/29/2010	2:43:21 AM	PHl3 MFC set to  0.000000
6/29/2010	2:43:21 AM	SiCl4 MFC set to  0.000000
6/29/2010	2:43:21 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	2:43:21 AM	Tube furnace set to 0
6/29/2010	2:52:21 AM	Helium valve closed
6/29/2010	2:52:21 AM	H2 valve closed
6/29/2010	2:52:21 AM	BCl3 valve closed
6/29/2010	2:52:21 AM	PH3 valve closed
6/29/2010	2:52:21 AM	SiCl4 pre valve closed
6/29/2010	2:52:21 AM	SiCl4 post valve closed
6/29/2010	2:52:21 AM	Bubbler valve closed
6/29/2010	2:52:21 AM	Main Vac valve opened
6/29/2010	2:52:21 AM	Bypass valve opened
6/29/2010	2:52:21 AM	Helium MFC set to  0.000000
6/29/2010	2:52:21 AM	H2 MFC set to  0.000000
6/29/2010	2:52:21 AM	BCl3 MFC set to  0.000000
6/29/2010	2:52:21 AM	PHl3 MFC set to  0.000000
6/29/2010	2:52:21 AM	SiCl4 MFC set to  0.000000
6/29/2010	2:52:21 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	2:52:22 AM	Tube furnace set to 0
6/29/2010	2:52:23 AM	Run finished at 2:52 AM
6/29/2010	2:59:39 AM	Helium MFC set to  100.000000
6/29/2010	2:59:40 AM	Helium valve opened
6/29/2010	3:15:05 AM	Helium valve closed
6/29/2010	3:15:59 AM	Bypass valve closed
6/29/2010	3:15:59 AM	Main Vac valve closed
6/29/2010	3:16:12 AM	Bypass valve opened
6/29/2010	3:16:12 AM	Main Vac valve opened
6/29/2010	3:16:35 AM	Recipe started at 3:16 AM
6/29/2010	3:16:35 AM	Helium valve closed
6/29/2010	3:16:35 AM	BCl3 valve closed
6/29/2010	3:16:35 AM	PH3 valve closed
6/29/2010	3:16:35 AM	SiCl4 pre valve closed
6/29/2010	3:16:35 AM	SiCl4 post valve closed
6/29/2010	3:16:35 AM	Main Vac valve closed
6/29/2010	3:16:35 AM	Bypass valve closed
6/29/2010	3:16:35 AM	Bubbler valve closed
6/29/2010	3:16:35 AM	H2 valve opened
6/29/2010	3:16:35 AM	Helium MFC set to  0.000000
6/29/2010	3:16:35 AM	H2 MFC set to  500.000000
6/29/2010	3:16:35 AM	BCl3 MFC set to  0.000000
6/29/2010	3:16:35 AM	PHl3 MFC set to  0.000000
6/29/2010	3:16:35 AM	SiCl4 MFC set to  0.000000
6/29/2010	3:16:35 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	3:16:35 AM	Tube furnace set to 0
6/29/2010	3:17:56 AM	Helium valve closed
6/29/2010	3:17:56 AM	BCl3 valve closed
6/29/2010	3:17:56 AM	PH3 valve closed
6/29/2010	3:17:56 AM	SiCl4 pre valve closed
6/29/2010	3:17:56 AM	SiCl4 post valve closed
6/29/2010	3:17:56 AM	Main Vac valve closed
6/29/2010	3:17:56 AM	Bypass valve closed
6/29/2010	3:17:56 AM	H2 valve opened
6/29/2010	3:17:56 AM	Bubbler valve opened
6/29/2010	3:17:56 AM	Helium MFC set to  0.000000
6/29/2010	3:17:56 AM	H2 MFC set to  500.000000
6/29/2010	3:17:56 AM	BCl3 MFC set to  0.000000
6/29/2010	3:17:56 AM	PHl3 MFC set to  0.000000
6/29/2010	3:17:56 AM	SiCl4 MFC set to  0.000000
6/29/2010	3:17:56 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	3:17:56 AM	Tube furnace set to 1000
6/29/2010	3:37:56 AM	Helium valve closed
6/29/2010	3:37:56 AM	PH3 valve closed
6/29/2010	3:37:56 AM	Main Vac valve closed
6/29/2010	3:37:56 AM	Bypass valve closed
6/29/2010	3:37:56 AM	H2 valve opened
6/29/2010	3:37:56 AM	BCl3 valve opened
6/29/2010	3:37:56 AM	SiCl4 pre valve opened
6/29/2010	3:37:56 AM	SiCl4 post valve opened
6/29/2010	3:37:56 AM	Bubbler valve opened
6/29/2010	3:37:56 AM	Helium MFC set to  0.000000
6/29/2010	3:37:56 AM	H2 MFC set to  500.000000
6/29/2010	3:37:56 AM	BCl3 MFC set to  35.000000
6/29/2010	3:37:56 AM	PHl3 MFC set to  0.000000
6/29/2010	3:37:56 AM	SiCl4 MFC set to  50.000000
6/29/2010	3:37:56 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	3:37:56 AM	Tube furnace set to 1000
6/29/2010	3:52:56 AM	H2 valve closed
6/29/2010	3:52:56 AM	BCl3 valve closed
6/29/2010	3:52:56 AM	PH3 valve closed
6/29/2010	3:52:56 AM	SiCl4 pre valve closed
6/29/2010	3:52:56 AM	SiCl4 post valve closed
6/29/2010	3:52:56 AM	Main Vac valve closed
6/29/2010	3:52:56 AM	Bypass valve closed
6/29/2010	3:52:56 AM	Helium valve opened
6/29/2010	3:52:56 AM	Bubbler valve opened
6/29/2010	3:52:56 AM	Helium MFC set to  500.000000
6/29/2010	3:52:56 AM	H2 MFC set to  0.000000
6/29/2010	3:52:56 AM	BCl3 MFC set to  0.000000
6/29/2010	3:52:56 AM	PHl3 MFC set to  0.000000
6/29/2010	3:52:56 AM	SiCl4 MFC set to  0.000000
6/29/2010	3:52:56 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	3:52:56 AM	Tube furnace set to 750
6/29/2010	4:12:56 AM	H2 valve closed
6/29/2010	4:12:56 AM	BCl3 valve closed
6/29/2010	4:12:56 AM	PH3 valve closed
6/29/2010	4:12:56 AM	SiCl4 pre valve closed
6/29/2010	4:12:56 AM	SiCl4 post valve closed
6/29/2010	4:12:56 AM	Main Vac valve closed
6/29/2010	4:12:56 AM	Bypass valve closed
6/29/2010	4:12:56 AM	Helium valve opened
6/29/2010	4:12:56 AM	Bubbler valve opened
6/29/2010	4:12:56 AM	Helium MFC set to  500.000000
6/29/2010	4:12:56 AM	H2 MFC set to  0.000000
6/29/2010	4:12:56 AM	BCl3 MFC set to  0.000000
6/29/2010	4:12:56 AM	PHl3 MFC set to  0.000000
6/29/2010	4:12:56 AM	SiCl4 MFC set to  0.000000
6/29/2010	4:12:56 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	4:12:56 AM	Tube furnace set to 0
6/29/2010	4:32:56 AM	Helium valve closed
6/29/2010	4:32:56 AM	H2 valve closed
6/29/2010	4:32:56 AM	BCl3 valve closed
6/29/2010	4:32:56 AM	PH3 valve closed
6/29/2010	4:32:56 AM	SiCl4 pre valve closed
6/29/2010	4:32:56 AM	SiCl4 post valve closed
6/29/2010	4:32:56 AM	Main Vac valve closed
6/29/2010	4:32:56 AM	Bypass valve closed
6/29/2010	4:32:56 AM	Bubbler valve closed
6/29/2010	4:32:56 AM	Helium MFC set to  0.000000
6/29/2010	4:32:56 AM	H2 MFC set to  0.000000
6/29/2010	4:32:56 AM	BCl3 MFC set to  0.000000
6/29/2010	4:32:56 AM	PHl3 MFC set to  0.000000
6/29/2010	4:32:56 AM	SiCl4 MFC set to  0.000000
6/29/2010	4:32:56 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	4:32:56 AM	Tube furnace set to 0
6/29/2010	4:32:56 AM	Run finished at 4:32 AM
6/29/2010	7:06:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2010	7:06:03 AM	Recipe started at 7:06 AM
6/29/2010	7:06:03 AM	H2 valve closed
6/29/2010	7:06:03 AM	BCl3 valve closed
6/29/2010	7:06:03 AM	PH3 valve closed
6/29/2010	7:06:03 AM	SiCl4 pre valve closed
6/29/2010	7:06:03 AM	SiCl4 post valve closed
6/29/2010	7:06:03 AM	Main Vac valve closed
6/29/2010	7:06:03 AM	Bypass valve closed
6/29/2010	7:06:03 AM	Bubbler valve closed
6/29/2010	7:06:03 AM	Helium valve opened
6/29/2010	7:06:03 AM	Helium MFC set to  500.000000
6/29/2010	7:06:03 AM	H2 MFC set to  0.000000
6/29/2010	7:06:03 AM	BCl3 MFC set to  0.000000
6/29/2010	7:06:03 AM	PHl3 MFC set to  0.000000
6/29/2010	7:06:03 AM	SiCl4 MFC set to  0.000000
6/29/2010	7:06:03 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	7:06:03 AM	Tube furnace set to 0
6/29/2010	7:06:12 AM	Helium valve closed
6/29/2010	7:06:12 AM	H2 valve closed
6/29/2010	7:06:12 AM	BCl3 valve closed
6/29/2010	7:06:12 AM	PH3 valve closed
6/29/2010	7:06:12 AM	SiCl4 pre valve closed
6/29/2010	7:06:12 AM	SiCl4 post valve closed
6/29/2010	7:06:12 AM	Main Vac valve closed
6/29/2010	7:06:12 AM	Bypass valve closed
6/29/2010	7:06:12 AM	Bubbler valve closed
6/29/2010	7:06:12 AM	Helium MFC set to  0.000000
6/29/2010	7:06:12 AM	H2 MFC set to  0.000000
6/29/2010	7:06:12 AM	BCl3 MFC set to  0.000000
6/29/2010	7:06:12 AM	PHl3 MFC set to  0.000000
6/29/2010	7:06:12 AM	SiCl4 MFC set to  0.000000
6/29/2010	7:06:12 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	7:06:13 AM	Tube furnace set to 0
6/29/2010	7:06:13 AM	Run finished at 7:06 AM
6/29/2010	7:06:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2010	7:08:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2010	7:08:39 AM	Recipe started at 7:08 AM
6/29/2010	7:08:39 AM	Helium valve closed
6/29/2010	7:08:39 AM	H2 valve closed
6/29/2010	7:08:39 AM	BCl3 valve closed
6/29/2010	7:08:39 AM	PH3 valve closed
6/29/2010	7:08:39 AM	SiCl4 pre valve closed
6/29/2010	7:08:39 AM	SiCl4 post valve closed
6/29/2010	7:08:39 AM	Main Vac valve closed
6/29/2010	7:08:39 AM	Bubbler valve closed
6/29/2010	7:08:39 AM	Bypass valve opened
6/29/2010	7:08:39 AM	Helium MFC set to  0.000000
6/29/2010	7:08:39 AM	H2 MFC set to  0.000000
6/29/2010	7:08:39 AM	BCl3 MFC set to  0.000000
6/29/2010	7:08:39 AM	PHl3 MFC set to  0.000000
6/29/2010	7:08:39 AM	SiCl4 MFC set to  0.000000
6/29/2010	7:08:39 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	7:08:39 AM	Tube furnace set to 0
6/29/2010	7:09:27 AM	Helium valve closed
6/29/2010	7:09:27 AM	H2 valve closed
6/29/2010	7:09:27 AM	BCl3 valve closed
6/29/2010	7:09:27 AM	PH3 valve closed
6/29/2010	7:09:27 AM	SiCl4 pre valve closed
6/29/2010	7:09:27 AM	SiCl4 post valve closed
6/29/2010	7:09:27 AM	Bubbler valve closed
6/29/2010	7:09:27 AM	Main Vac valve opened
6/29/2010	7:09:27 AM	Bypass valve opened
6/29/2010	7:09:27 AM	Helium MFC set to  0.000000
6/29/2010	7:09:27 AM	H2 MFC set to  0.000000
6/29/2010	7:09:27 AM	BCl3 MFC set to  0.000000
6/29/2010	7:09:27 AM	PHl3 MFC set to  0.000000
6/29/2010	7:09:27 AM	SiCl4 MFC set to  0.000000
6/29/2010	7:09:27 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	7:09:27 AM	Tube furnace set to 0
6/29/2010	7:09:27 AM	Run finished at 7:09 AM
6/29/2010	7:09:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2010	7:20:00 AM	Helium MFC set to  100.000000
6/29/2010	7:20:01 AM	Helium valve opened
6/29/2010	7:21:35 AM	Helium valve closed
6/29/2010	7:44:18 AM	Helium valve opened
6/29/2010	7:51:17 AM	Helium valve closed
6/29/2010	8:54:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2010	8:54:51 AM	Recipe started at 8:54 AM
6/29/2010	8:54:51 AM	H2 valve closed
6/29/2010	8:54:51 AM	BCl3 valve closed
6/29/2010	8:54:51 AM	PH3 valve closed
6/29/2010	8:54:51 AM	SiCl4 pre valve closed
6/29/2010	8:54:51 AM	SiCl4 post valve closed
6/29/2010	8:54:51 AM	Main Vac valve closed
6/29/2010	8:54:51 AM	Bypass valve closed
6/29/2010	8:54:51 AM	Bubbler valve closed
6/29/2010	8:54:51 AM	Helium valve opened
6/29/2010	8:54:51 AM	Helium MFC set to  500.000000
6/29/2010	8:54:51 AM	H2 MFC set to  0.000000
6/29/2010	8:54:51 AM	BCl3 MFC set to  0.000000
6/29/2010	8:54:51 AM	PHl3 MFC set to  0.000000
6/29/2010	8:54:51 AM	SiCl4 MFC set to  0.000000
6/29/2010	8:54:51 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	8:54:51 AM	Tube furnace set to 0
6/29/2010	8:56:11 AM	Helium valve closed
6/29/2010	8:56:11 AM	H2 valve closed
6/29/2010	8:56:11 AM	BCl3 valve closed
6/29/2010	8:56:11 AM	PH3 valve closed
6/29/2010	8:56:11 AM	SiCl4 pre valve closed
6/29/2010	8:56:11 AM	SiCl4 post valve closed
6/29/2010	8:56:11 AM	Main Vac valve closed
6/29/2010	8:56:11 AM	Bypass valve closed
6/29/2010	8:56:11 AM	Bubbler valve closed
6/29/2010	8:56:11 AM	Helium MFC set to  0.000000
6/29/2010	8:56:11 AM	H2 MFC set to  0.000000
6/29/2010	8:56:11 AM	BCl3 MFC set to  0.000000
6/29/2010	8:56:11 AM	PHl3 MFC set to  0.000000
6/29/2010	8:56:11 AM	SiCl4 MFC set to  0.000000
6/29/2010	8:56:11 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	8:56:12 AM	Tube furnace set to 0
6/29/2010	8:56:12 AM	Run finished at 8:56 AM
6/29/2010	8:56:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2010	9:02:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/29/2010	9:02:49 AM	Recipe started at 9:02 AM
6/29/2010	9:02:49 AM	Helium valve closed
6/29/2010	9:02:49 AM	H2 valve closed
6/29/2010	9:02:49 AM	BCl3 valve closed
6/29/2010	9:02:49 AM	PH3 valve closed
6/29/2010	9:02:49 AM	SiCl4 pre valve closed
6/29/2010	9:02:49 AM	SiCl4 post valve closed
6/29/2010	9:02:49 AM	Main Vac valve closed
6/29/2010	9:02:49 AM	Bypass valve closed
6/29/2010	9:02:49 AM	Bubbler valve closed
6/29/2010	9:02:49 AM	Helium MFC set to  0.000000
6/29/2010	9:02:49 AM	H2 MFC set to  0.000000
6/29/2010	9:02:49 AM	BCl3 MFC set to  0.000000
6/29/2010	9:02:49 AM	PHl3 MFC set to  0.000000
6/29/2010	9:02:49 AM	SiCl4 MFC set to  0.000000
6/29/2010	9:02:49 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	9:02:49 AM	Tube furnace set to 0
6/29/2010	9:02:49 AM	Run finished at 9:02 AM
6/29/2010	9:02:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/29/2010	9:16:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2010	9:16:01 AM	Recipe started at 9:16 AM
6/29/2010	9:16:01 AM	Helium valve closed
6/29/2010	9:16:01 AM	H2 valve closed
6/29/2010	9:16:01 AM	BCl3 valve closed
6/29/2010	9:16:01 AM	PH3 valve closed
6/29/2010	9:16:01 AM	SiCl4 pre valve closed
6/29/2010	9:16:01 AM	SiCl4 post valve closed
6/29/2010	9:16:01 AM	Main Vac valve closed
6/29/2010	9:16:01 AM	Bubbler valve closed
6/29/2010	9:16:01 AM	Bypass valve opened
6/29/2010	9:16:01 AM	Helium MFC set to  0.000000
6/29/2010	9:16:01 AM	H2 MFC set to  0.000000
6/29/2010	9:16:01 AM	BCl3 MFC set to  0.000000
6/29/2010	9:16:01 AM	PHl3 MFC set to  0.000000
6/29/2010	9:16:01 AM	SiCl4 MFC set to  0.000000
6/29/2010	9:16:01 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	9:16:01 AM	Tube furnace set to 0
6/29/2010	9:16:35 AM	Helium valve closed
6/29/2010	9:16:35 AM	H2 valve closed
6/29/2010	9:16:35 AM	BCl3 valve closed
6/29/2010	9:16:35 AM	PH3 valve closed
6/29/2010	9:16:35 AM	SiCl4 pre valve closed
6/29/2010	9:16:35 AM	SiCl4 post valve closed
6/29/2010	9:16:35 AM	Bubbler valve closed
6/29/2010	9:16:35 AM	Main Vac valve opened
6/29/2010	9:16:35 AM	Bypass valve opened
6/29/2010	9:16:35 AM	Helium MFC set to  0.000000
6/29/2010	9:16:35 AM	H2 MFC set to  0.000000
6/29/2010	9:16:35 AM	BCl3 MFC set to  0.000000
6/29/2010	9:16:35 AM	PHl3 MFC set to  0.000000
6/29/2010	9:16:35 AM	SiCl4 MFC set to  0.000000
6/29/2010	9:16:35 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	9:16:35 AM	Tube furnace set to 0
6/29/2010	9:16:36 AM	Run finished at 9:16 AM
6/29/2010	9:16:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2010	9:17:35 AM	Helium valve opened
6/29/2010	9:17:39 AM	Helium MFC set to  500.000000
6/29/2010	9:19:11 AM	Helium valve closed
6/29/2010	9:19:28 AM	Helium valve opened
6/29/2010	9:21:36 AM	Helium valve closed
6/29/2010	9:21:40 AM	Helium valve opened
6/29/2010	9:24:12 AM	Helium valve closed
6/29/2010	9:24:33 AM	Helium valve opened
6/29/2010	9:31:06 AM	Helium valve closed
6/29/2010	9:31:30 AM	Helium MFC set to  50.000000
6/29/2010	9:31:31 AM	Helium valve opened
6/29/2010	9:31:38 AM	Helium MFC set to  500.000000
6/29/2010	9:39:27 AM	Helium MFC set to  0.000000
6/29/2010	9:39:28 AM	Helium valve closed
6/29/2010	9:39:48 AM	Helium MFC set to  5.000000
6/29/2010	9:39:50 AM	Helium valve opened
6/29/2010	9:39:59 AM	Helium MFC set to  100.000000
6/29/2010	9:40:08 AM	Helium MFC set to  500.000000
6/29/2010	9:40:13 AM	Helium MFC set to  100.000000
6/29/2010	9:40:24 AM	Helium MFC set to  0.000000
6/29/2010	9:40:26 AM	Helium valve closed
6/29/2010	9:44:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2010	9:44:52 AM	Recipe started at 9:44 AM
6/29/2010	9:44:52 AM	H2 valve closed
6/29/2010	9:44:52 AM	BCl3 valve closed
6/29/2010	9:44:52 AM	PH3 valve closed
6/29/2010	9:44:52 AM	SiCl4 pre valve closed
6/29/2010	9:44:52 AM	SiCl4 post valve closed
6/29/2010	9:44:52 AM	Main Vac valve closed
6/29/2010	9:44:52 AM	Bypass valve closed
6/29/2010	9:44:52 AM	Bubbler valve closed
6/29/2010	9:44:52 AM	Helium valve opened
6/29/2010	9:44:52 AM	Helium MFC set to  500.000000
6/29/2010	9:44:52 AM	H2 MFC set to  0.000000
6/29/2010	9:44:52 AM	BCl3 MFC set to  0.000000
6/29/2010	9:44:52 AM	PHl3 MFC set to  0.000000
6/29/2010	9:44:52 AM	SiCl4 MFC set to  0.000000
6/29/2010	9:44:52 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	9:44:52 AM	Tube furnace set to 0
6/29/2010	9:46:13 AM	Helium valve closed
6/29/2010	9:46:13 AM	H2 valve closed
6/29/2010	9:46:13 AM	BCl3 valve closed
6/29/2010	9:46:13 AM	PH3 valve closed
6/29/2010	9:46:13 AM	SiCl4 pre valve closed
6/29/2010	9:46:13 AM	SiCl4 post valve closed
6/29/2010	9:46:13 AM	Main Vac valve closed
6/29/2010	9:46:13 AM	Bypass valve closed
6/29/2010	9:46:13 AM	Bubbler valve closed
6/29/2010	9:46:13 AM	Helium MFC set to  0.000000
6/29/2010	9:46:13 AM	H2 MFC set to  0.000000
6/29/2010	9:46:13 AM	BCl3 MFC set to  0.000000
6/29/2010	9:46:13 AM	PHl3 MFC set to  0.000000
6/29/2010	9:46:13 AM	SiCl4 MFC set to  0.000000
6/29/2010	9:46:13 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	9:46:13 AM	Tube furnace set to 0
6/29/2010	9:46:13 AM	Run finished at 9:46 AM
6/29/2010	9:46:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2010	9:54:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2010	9:54:43 AM	Recipe started at 9:54 AM
6/29/2010	9:54:43 AM	Helium valve closed
6/29/2010	9:54:43 AM	H2 valve closed
6/29/2010	9:54:43 AM	BCl3 valve closed
6/29/2010	9:54:43 AM	PH3 valve closed
6/29/2010	9:54:43 AM	SiCl4 pre valve closed
6/29/2010	9:54:43 AM	SiCl4 post valve closed
6/29/2010	9:54:43 AM	Main Vac valve closed
6/29/2010	9:54:43 AM	Bubbler valve closed
6/29/2010	9:54:43 AM	Bypass valve opened
6/29/2010	9:54:43 AM	Helium MFC set to  0.000000
6/29/2010	9:54:43 AM	H2 MFC set to  0.000000
6/29/2010	9:54:43 AM	BCl3 MFC set to  0.000000
6/29/2010	9:54:43 AM	PHl3 MFC set to  0.000000
6/29/2010	9:54:43 AM	SiCl4 MFC set to  0.000000
6/29/2010	9:54:43 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	9:54:43 AM	Tube furnace set to 0
6/29/2010	9:55:31 AM	Helium valve closed
6/29/2010	9:55:31 AM	H2 valve closed
6/29/2010	9:55:31 AM	BCl3 valve closed
6/29/2010	9:55:31 AM	PH3 valve closed
6/29/2010	9:55:31 AM	SiCl4 pre valve closed
6/29/2010	9:55:31 AM	SiCl4 post valve closed
6/29/2010	9:55:31 AM	Bubbler valve closed
6/29/2010	9:55:31 AM	Main Vac valve opened
6/29/2010	9:55:31 AM	Bypass valve opened
6/29/2010	9:55:31 AM	Helium MFC set to  0.000000
6/29/2010	9:55:31 AM	H2 MFC set to  0.000000
6/29/2010	9:55:31 AM	BCl3 MFC set to  0.000000
6/29/2010	9:55:31 AM	PHl3 MFC set to  0.000000
6/29/2010	9:55:31 AM	SiCl4 MFC set to  0.000000
6/29/2010	9:55:31 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	9:55:32 AM	Tube furnace set to 0
6/29/2010	9:55:32 AM	Run finished at 9:55 AM
6/29/2010	9:55:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2010	9:56:06 AM	Recipe started at 9:56 AM
6/29/2010	9:56:06 AM	Helium valve closed
6/29/2010	9:56:06 AM	H2 valve closed
6/29/2010	9:56:06 AM	BCl3 valve closed
6/29/2010	9:56:06 AM	PH3 valve closed
6/29/2010	9:56:06 AM	SiCl4 pre valve closed
6/29/2010	9:56:06 AM	SiCl4 post valve closed
6/29/2010	9:56:06 AM	Main Vac valve closed
6/29/2010	9:56:06 AM	Bubbler valve closed
6/29/2010	9:56:06 AM	Bypass valve opened
6/29/2010	9:56:06 AM	Helium MFC set to  0.000000
6/29/2010	9:56:06 AM	H2 MFC set to  0.000000
6/29/2010	9:56:06 AM	BCl3 MFC set to  0.000000
6/29/2010	9:56:06 AM	PHl3 MFC set to  0.000000
6/29/2010	9:56:06 AM	SiCl4 MFC set to  0.000000
6/29/2010	9:56:06 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	9:56:06 AM	Tube furnace set to 0
6/29/2010	9:56:07 AM	Helium valve closed
6/29/2010	9:56:07 AM	H2 valve closed
6/29/2010	9:56:07 AM	BCl3 valve closed
6/29/2010	9:56:07 AM	PH3 valve closed
6/29/2010	9:56:07 AM	SiCl4 pre valve closed
6/29/2010	9:56:07 AM	SiCl4 post valve closed
6/29/2010	9:56:07 AM	Bubbler valve closed
6/29/2010	9:56:07 AM	Main Vac valve opened
6/29/2010	9:56:07 AM	Bypass valve opened
6/29/2010	9:56:07 AM	Helium MFC set to  0.000000
6/29/2010	9:56:07 AM	H2 MFC set to  0.000000
6/29/2010	9:56:07 AM	BCl3 MFC set to  0.000000
6/29/2010	9:56:07 AM	PHl3 MFC set to  0.000000
6/29/2010	9:56:07 AM	SiCl4 MFC set to  0.000000
6/29/2010	9:56:07 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	9:56:07 AM	Tube furnace set to 0
6/29/2010	9:57:07 AM	H2 valve closed
6/29/2010	9:57:07 AM	BCl3 valve closed
6/29/2010	9:57:07 AM	PH3 valve closed
6/29/2010	9:57:07 AM	SiCl4 pre valve closed
6/29/2010	9:57:07 AM	SiCl4 post valve closed
6/29/2010	9:57:07 AM	Bubbler valve closed
6/29/2010	9:57:07 AM	Helium valve opened
6/29/2010	9:57:07 AM	Main Vac valve opened
6/29/2010	9:57:07 AM	Bypass valve opened
6/29/2010	9:57:07 AM	Helium MFC set to  100.000000
6/29/2010	9:57:07 AM	H2 MFC set to  0.000000
6/29/2010	9:57:07 AM	BCl3 MFC set to  0.000000
6/29/2010	9:57:07 AM	PHl3 MFC set to  0.000000
6/29/2010	9:57:07 AM	SiCl4 MFC set to  0.000000
6/29/2010	9:57:07 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	9:57:07 AM	Tube furnace set to 0
6/29/2010	10:06:07 AM	Helium valve closed
6/29/2010	10:06:07 AM	H2 valve closed
6/29/2010	10:06:07 AM	BCl3 valve closed
6/29/2010	10:06:07 AM	PH3 valve closed
6/29/2010	10:06:07 AM	SiCl4 pre valve closed
6/29/2010	10:06:07 AM	SiCl4 post valve closed
6/29/2010	10:06:07 AM	Bubbler valve closed
6/29/2010	10:06:07 AM	Main Vac valve opened
6/29/2010	10:06:07 AM	Bypass valve opened
6/29/2010	10:06:07 AM	Helium MFC set to  0.000000
6/29/2010	10:06:07 AM	H2 MFC set to  0.000000
6/29/2010	10:06:07 AM	BCl3 MFC set to  0.000000
6/29/2010	10:06:07 AM	PHl3 MFC set to  0.000000
6/29/2010	10:06:07 AM	SiCl4 MFC set to  0.000000
6/29/2010	10:06:07 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	10:06:07 AM	Tube furnace set to 0
6/29/2010	10:07:07 AM	H2 valve closed
6/29/2010	10:07:07 AM	BCl3 valve closed
6/29/2010	10:07:07 AM	PH3 valve closed
6/29/2010	10:07:07 AM	SiCl4 pre valve closed
6/29/2010	10:07:07 AM	SiCl4 post valve closed
6/29/2010	10:07:07 AM	Bubbler valve closed
6/29/2010	10:07:07 AM	Helium valve opened
6/29/2010	10:07:07 AM	Main Vac valve opened
6/29/2010	10:07:07 AM	Bypass valve opened
6/29/2010	10:07:07 AM	Helium MFC set to  100.000000
6/29/2010	10:07:07 AM	H2 MFC set to  0.000000
6/29/2010	10:07:07 AM	BCl3 MFC set to  0.000000
6/29/2010	10:07:07 AM	PHl3 MFC set to  0.000000
6/29/2010	10:07:07 AM	SiCl4 MFC set to  0.000000
6/29/2010	10:07:07 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	10:07:07 AM	Tube furnace set to 0
6/29/2010	10:16:07 AM	Helium valve closed
6/29/2010	10:16:07 AM	H2 valve closed
6/29/2010	10:16:07 AM	BCl3 valve closed
6/29/2010	10:16:07 AM	PH3 valve closed
6/29/2010	10:16:07 AM	SiCl4 pre valve closed
6/29/2010	10:16:07 AM	SiCl4 post valve closed
6/29/2010	10:16:07 AM	Bubbler valve closed
6/29/2010	10:16:07 AM	Main Vac valve opened
6/29/2010	10:16:07 AM	Bypass valve opened
6/29/2010	10:16:07 AM	Helium MFC set to  0.000000
6/29/2010	10:16:07 AM	H2 MFC set to  0.000000
6/29/2010	10:16:07 AM	BCl3 MFC set to  0.000000
6/29/2010	10:16:07 AM	PHl3 MFC set to  0.000000
6/29/2010	10:16:07 AM	SiCl4 MFC set to  0.000000
6/29/2010	10:16:07 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	10:16:07 AM	Tube furnace set to 0
6/29/2010	10:17:07 AM	H2 valve closed
6/29/2010	10:17:07 AM	BCl3 valve closed
6/29/2010	10:17:07 AM	PH3 valve closed
6/29/2010	10:17:07 AM	SiCl4 pre valve closed
6/29/2010	10:17:07 AM	SiCl4 post valve closed
6/29/2010	10:17:07 AM	Bubbler valve closed
6/29/2010	10:17:07 AM	Helium valve opened
6/29/2010	10:17:07 AM	Main Vac valve opened
6/29/2010	10:17:07 AM	Bypass valve opened
6/29/2010	10:17:07 AM	Helium MFC set to  100.000000
6/29/2010	10:17:07 AM	H2 MFC set to  0.000000
6/29/2010	10:17:07 AM	BCl3 MFC set to  0.000000
6/29/2010	10:17:07 AM	PHl3 MFC set to  0.000000
6/29/2010	10:17:07 AM	SiCl4 MFC set to  0.000000
6/29/2010	10:17:07 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	10:17:08 AM	Tube furnace set to 0
6/29/2010	10:26:08 AM	Helium valve closed
6/29/2010	10:26:08 AM	H2 valve closed
6/29/2010	10:26:08 AM	BCl3 valve closed
6/29/2010	10:26:08 AM	PH3 valve closed
6/29/2010	10:26:08 AM	SiCl4 pre valve closed
6/29/2010	10:26:08 AM	SiCl4 post valve closed
6/29/2010	10:26:08 AM	Bubbler valve closed
6/29/2010	10:26:08 AM	Main Vac valve opened
6/29/2010	10:26:08 AM	Bypass valve opened
6/29/2010	10:26:08 AM	Helium MFC set to  0.000000
6/29/2010	10:26:08 AM	H2 MFC set to  0.000000
6/29/2010	10:26:08 AM	BCl3 MFC set to  0.000000
6/29/2010	10:26:08 AM	PHl3 MFC set to  0.000000
6/29/2010	10:26:08 AM	SiCl4 MFC set to  0.000000
6/29/2010	10:26:08 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	10:26:08 AM	Tube furnace set to 0
6/29/2010	10:26:09 AM	Run finished at 10:26 AM
6/29/2010	10:48:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/29/2010	10:48:12 AM	Recipe started at 10:48 AM
6/29/2010	10:48:12 AM	Helium valve closed
6/29/2010	10:48:12 AM	H2 valve closed
6/29/2010	10:48:12 AM	BCl3 valve closed
6/29/2010	10:48:12 AM	PH3 valve closed
6/29/2010	10:48:12 AM	SiCl4 pre valve closed
6/29/2010	10:48:12 AM	SiCl4 post valve closed
6/29/2010	10:48:12 AM	Main Vac valve closed
6/29/2010	10:48:12 AM	Bypass valve closed
6/29/2010	10:48:12 AM	Bubbler valve closed
6/29/2010	10:48:12 AM	Helium MFC set to  0.000000
6/29/2010	10:48:12 AM	H2 MFC set to  0.000000
6/29/2010	10:48:12 AM	BCl3 MFC set to  0.000000
6/29/2010	10:48:12 AM	PHl3 MFC set to  0.000000
6/29/2010	10:48:12 AM	SiCl4 MFC set to  0.000000
6/29/2010	10:48:12 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	10:48:12 AM	Tube furnace set to 0
6/29/2010	10:48:12 AM	Run finished at 10:48 AM
6/29/2010	10:48:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/29/2010	10:48:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2010	10:48:23 AM	Recipe started at 10:48 AM
6/29/2010	10:48:23 AM	Helium valve closed
6/29/2010	10:48:23 AM	H2 valve closed
6/29/2010	10:48:23 AM	BCl3 valve closed
6/29/2010	10:48:23 AM	PH3 valve closed
6/29/2010	10:48:23 AM	SiCl4 pre valve closed
6/29/2010	10:48:23 AM	SiCl4 post valve closed
6/29/2010	10:48:23 AM	Main Vac valve closed
6/29/2010	10:48:23 AM	Bubbler valve closed
6/29/2010	10:48:23 AM	Bypass valve opened
6/29/2010	10:48:23 AM	Helium MFC set to  0.000000
6/29/2010	10:48:23 AM	H2 MFC set to  0.000000
6/29/2010	10:48:23 AM	BCl3 MFC set to  0.000000
6/29/2010	10:48:23 AM	PHl3 MFC set to  0.000000
6/29/2010	10:48:23 AM	SiCl4 MFC set to  0.000000
6/29/2010	10:48:23 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	10:48:23 AM	Tube furnace set to 0
6/29/2010	10:48:23 AM	Helium valve closed
6/29/2010	10:48:23 AM	H2 valve closed
6/29/2010	10:48:23 AM	BCl3 valve closed
6/29/2010	10:48:23 AM	PH3 valve closed
6/29/2010	10:48:23 AM	SiCl4 pre valve closed
6/29/2010	10:48:23 AM	SiCl4 post valve closed
6/29/2010	10:48:23 AM	Bubbler valve closed
6/29/2010	10:48:23 AM	Main Vac valve opened
6/29/2010	10:48:23 AM	Bypass valve opened
6/29/2010	10:48:23 AM	Helium MFC set to  0.000000
6/29/2010	10:48:23 AM	H2 MFC set to  0.000000
6/29/2010	10:48:23 AM	BCl3 MFC set to  0.000000
6/29/2010	10:48:23 AM	PHl3 MFC set to  0.000000
6/29/2010	10:48:23 AM	SiCl4 MFC set to  0.000000
6/29/2010	10:48:23 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	10:48:23 AM	Tube furnace set to 0
6/29/2010	10:48:24 AM	Run finished at 10:48 AM
6/29/2010	10:48:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2010	10:49:28 AM	Recipe started at 10:49 AM
6/29/2010	10:49:28 AM	Helium valve closed
6/29/2010	10:49:28 AM	BCl3 valve closed
6/29/2010	10:49:28 AM	PH3 valve closed
6/29/2010	10:49:28 AM	SiCl4 pre valve closed
6/29/2010	10:49:28 AM	SiCl4 post valve closed
6/29/2010	10:49:28 AM	Main Vac valve closed
6/29/2010	10:49:28 AM	Bypass valve closed
6/29/2010	10:49:28 AM	Bubbler valve closed
6/29/2010	10:49:28 AM	H2 valve opened
6/29/2010	10:49:28 AM	Helium MFC set to  0.000000
6/29/2010	10:49:28 AM	H2 MFC set to  500.000000
6/29/2010	10:49:28 AM	BCl3 MFC set to  0.000000
6/29/2010	10:49:28 AM	PHl3 MFC set to  0.000000
6/29/2010	10:49:28 AM	SiCl4 MFC set to  0.000000
6/29/2010	10:49:28 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	10:49:28 AM	Tube furnace set to 0
6/29/2010	10:50:51 AM	Helium valve closed
6/29/2010	10:50:51 AM	BCl3 valve closed
6/29/2010	10:50:51 AM	PH3 valve closed
6/29/2010	10:50:51 AM	SiCl4 pre valve closed
6/29/2010	10:50:51 AM	SiCl4 post valve closed
6/29/2010	10:50:51 AM	Main Vac valve closed
6/29/2010	10:50:51 AM	Bypass valve closed
6/29/2010	10:50:51 AM	H2 valve opened
6/29/2010	10:50:51 AM	Bubbler valve opened
6/29/2010	10:50:51 AM	Helium MFC set to  0.000000
6/29/2010	10:50:51 AM	H2 MFC set to  500.000000
6/29/2010	10:50:51 AM	BCl3 MFC set to  0.000000
6/29/2010	10:50:51 AM	PHl3 MFC set to  0.000000
6/29/2010	10:50:51 AM	SiCl4 MFC set to  0.000000
6/29/2010	10:50:51 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	10:50:52 AM	Tube furnace set to 1000
6/29/2010	11:10:52 AM	Helium valve closed
6/29/2010	11:10:52 AM	PH3 valve closed
6/29/2010	11:10:52 AM	Main Vac valve closed
6/29/2010	11:10:52 AM	Bypass valve closed
6/29/2010	11:10:52 AM	H2 valve opened
6/29/2010	11:10:52 AM	BCl3 valve opened
6/29/2010	11:10:52 AM	SiCl4 pre valve opened
6/29/2010	11:10:52 AM	SiCl4 post valve opened
6/29/2010	11:10:52 AM	Bubbler valve opened
6/29/2010	11:10:52 AM	Helium MFC set to  0.000000
6/29/2010	11:10:52 AM	H2 MFC set to  500.000000
6/29/2010	11:10:52 AM	BCl3 MFC set to  7.000000
6/29/2010	11:10:52 AM	PHl3 MFC set to  0.000000
6/29/2010	11:10:52 AM	SiCl4 MFC set to  50.000000
6/29/2010	11:10:52 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	11:10:52 AM	Tube furnace set to 1000
6/29/2010	11:25:52 AM	H2 valve closed
6/29/2010	11:25:52 AM	BCl3 valve closed
6/29/2010	11:25:52 AM	PH3 valve closed
6/29/2010	11:25:52 AM	SiCl4 pre valve closed
6/29/2010	11:25:52 AM	SiCl4 post valve closed
6/29/2010	11:25:52 AM	Main Vac valve closed
6/29/2010	11:25:52 AM	Bypass valve closed
6/29/2010	11:25:52 AM	Helium valve opened
6/29/2010	11:25:52 AM	Bubbler valve opened
6/29/2010	11:25:52 AM	Helium MFC set to  500.000000
6/29/2010	11:25:52 AM	H2 MFC set to  0.000000
6/29/2010	11:25:52 AM	BCl3 MFC set to  0.000000
6/29/2010	11:25:52 AM	PHl3 MFC set to  0.000000
6/29/2010	11:25:52 AM	SiCl4 MFC set to  0.000000
6/29/2010	11:25:52 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	11:25:52 AM	Tube furnace set to 0
6/29/2010	11:45:52 AM	Helium valve closed
6/29/2010	11:45:52 AM	H2 valve closed
6/29/2010	11:45:52 AM	BCl3 valve closed
6/29/2010	11:45:52 AM	PH3 valve closed
6/29/2010	11:45:52 AM	SiCl4 pre valve closed
6/29/2010	11:45:52 AM	SiCl4 post valve closed
6/29/2010	11:45:52 AM	Main Vac valve closed
6/29/2010	11:45:52 AM	Bypass valve closed
6/29/2010	11:45:52 AM	Bubbler valve closed
6/29/2010	11:45:52 AM	Helium MFC set to  0.000000
6/29/2010	11:45:52 AM	H2 MFC set to  0.000000
6/29/2010	11:45:52 AM	BCl3 MFC set to  0.000000
6/29/2010	11:45:52 AM	PHl3 MFC set to  0.000000
6/29/2010	11:45:52 AM	SiCl4 MFC set to  0.000000
6/29/2010	11:45:52 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	11:45:52 AM	Tube furnace set to 0
6/29/2010	11:45:52 AM	Run finished at 11:45 AM
6/29/2010	11:52:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2010	11:52:44 AM	Recipe started at 11:52 AM
6/29/2010	11:52:44 AM	H2 valve closed
6/29/2010	11:52:44 AM	BCl3 valve closed
6/29/2010	11:52:44 AM	PH3 valve closed
6/29/2010	11:52:44 AM	SiCl4 pre valve closed
6/29/2010	11:52:44 AM	SiCl4 post valve closed
6/29/2010	11:52:44 AM	Main Vac valve closed
6/29/2010	11:52:44 AM	Bypass valve closed
6/29/2010	11:52:44 AM	Bubbler valve closed
6/29/2010	11:52:44 AM	Helium valve opened
6/29/2010	11:52:44 AM	Helium MFC set to  500.000000
6/29/2010	11:52:44 AM	H2 MFC set to  0.000000
6/29/2010	11:52:44 AM	BCl3 MFC set to  0.000000
6/29/2010	11:52:44 AM	PHl3 MFC set to  0.000000
6/29/2010	11:52:44 AM	SiCl4 MFC set to  0.000000
6/29/2010	11:52:44 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	11:52:44 AM	Tube furnace set to 0
6/29/2010	11:52:48 AM	Helium valve closed
6/29/2010	11:52:48 AM	H2 valve closed
6/29/2010	11:52:48 AM	BCl3 valve closed
6/29/2010	11:52:48 AM	PH3 valve closed
6/29/2010	11:52:48 AM	SiCl4 pre valve closed
6/29/2010	11:52:48 AM	SiCl4 post valve closed
6/29/2010	11:52:48 AM	Main Vac valve closed
6/29/2010	11:52:48 AM	Bypass valve closed
6/29/2010	11:52:48 AM	Bubbler valve closed
6/29/2010	11:52:48 AM	Helium MFC set to  0.000000
6/29/2010	11:52:48 AM	H2 MFC set to  0.000000
6/29/2010	11:52:48 AM	BCl3 MFC set to  0.000000
6/29/2010	11:52:48 AM	PHl3 MFC set to  0.000000
6/29/2010	11:52:48 AM	SiCl4 MFC set to  0.000000
6/29/2010	11:52:48 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	11:52:48 AM	Tube furnace set to 0
6/29/2010	11:52:48 AM	Run finished at 11:52 AM
6/29/2010	11:52:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2010	11:55:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2010	11:56:00 AM	Recipe started at 11:56 AM
6/29/2010	11:56:00 AM	H2 valve closed
6/29/2010	11:56:00 AM	BCl3 valve closed
6/29/2010	11:56:00 AM	PH3 valve closed
6/29/2010	11:56:00 AM	SiCl4 pre valve closed
6/29/2010	11:56:00 AM	SiCl4 post valve closed
6/29/2010	11:56:00 AM	Main Vac valve closed
6/29/2010	11:56:00 AM	Bypass valve closed
6/29/2010	11:56:00 AM	Bubbler valve closed
6/29/2010	11:56:00 AM	Helium valve opened
6/29/2010	11:56:00 AM	Helium MFC set to  500.000000
6/29/2010	11:56:00 AM	H2 MFC set to  0.000000
6/29/2010	11:56:00 AM	BCl3 MFC set to  0.000000
6/29/2010	11:56:00 AM	PHl3 MFC set to  0.000000
6/29/2010	11:56:00 AM	SiCl4 MFC set to  0.000000
6/29/2010	11:56:00 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	11:56:00 AM	Tube furnace set to 0
6/29/2010	11:56:02 AM	Helium valve closed
6/29/2010	11:56:02 AM	H2 valve closed
6/29/2010	11:56:02 AM	BCl3 valve closed
6/29/2010	11:56:02 AM	PH3 valve closed
6/29/2010	11:56:02 AM	SiCl4 pre valve closed
6/29/2010	11:56:02 AM	SiCl4 post valve closed
6/29/2010	11:56:02 AM	Main Vac valve closed
6/29/2010	11:56:02 AM	Bypass valve closed
6/29/2010	11:56:02 AM	Bubbler valve closed
6/29/2010	11:56:02 AM	Helium MFC set to  0.000000
6/29/2010	11:56:02 AM	H2 MFC set to  0.000000
6/29/2010	11:56:02 AM	BCl3 MFC set to  0.000000
6/29/2010	11:56:02 AM	PHl3 MFC set to  0.000000
6/29/2010	11:56:02 AM	SiCl4 MFC set to  0.000000
6/29/2010	11:56:02 AM	Bypass solenoid MFC set to  0.000000
6/29/2010	11:56:02 AM	Tube furnace set to 0
6/29/2010	11:56:02 AM	Run finished at 11:56 AM
6/29/2010	11:56:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2010	12:01:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2010	12:01:09 PM	Recipe started at 12:01 PM
6/29/2010	12:01:09 PM	H2 valve closed
6/29/2010	12:01:09 PM	BCl3 valve closed
6/29/2010	12:01:09 PM	PH3 valve closed
6/29/2010	12:01:09 PM	SiCl4 pre valve closed
6/29/2010	12:01:09 PM	SiCl4 post valve closed
6/29/2010	12:01:09 PM	Main Vac valve closed
6/29/2010	12:01:09 PM	Bypass valve closed
6/29/2010	12:01:09 PM	Bubbler valve closed
6/29/2010	12:01:09 PM	Helium valve opened
6/29/2010	12:01:09 PM	Helium MFC set to  500.000000
6/29/2010	12:01:09 PM	H2 MFC set to  0.000000
6/29/2010	12:01:09 PM	BCl3 MFC set to  0.000000
6/29/2010	12:01:09 PM	PHl3 MFC set to  0.000000
6/29/2010	12:01:09 PM	SiCl4 MFC set to  0.000000
6/29/2010	12:01:09 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	12:01:09 PM	Tube furnace set to 0
6/29/2010	12:01:10 PM	Helium valve closed
6/29/2010	12:01:10 PM	H2 valve closed
6/29/2010	12:01:10 PM	BCl3 valve closed
6/29/2010	12:01:10 PM	PH3 valve closed
6/29/2010	12:01:10 PM	SiCl4 pre valve closed
6/29/2010	12:01:10 PM	SiCl4 post valve closed
6/29/2010	12:01:10 PM	Main Vac valve closed
6/29/2010	12:01:10 PM	Bypass valve closed
6/29/2010	12:01:10 PM	Bubbler valve closed
6/29/2010	12:01:10 PM	Helium MFC set to  0.000000
6/29/2010	12:01:10 PM	H2 MFC set to  0.000000
6/29/2010	12:01:10 PM	BCl3 MFC set to  0.000000
6/29/2010	12:01:10 PM	PHl3 MFC set to  0.000000
6/29/2010	12:01:10 PM	SiCl4 MFC set to  0.000000
6/29/2010	12:01:10 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	12:01:10 PM	Tube furnace set to 0
6/29/2010	12:01:11 PM	Run finished at 12:01 PM
6/29/2010	12:01:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2010	12:21:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2010	12:21:44 PM	Recipe started at 12:21 PM
6/29/2010	12:21:44 PM	Helium valve closed
6/29/2010	12:21:44 PM	H2 valve closed
6/29/2010	12:21:44 PM	BCl3 valve closed
6/29/2010	12:21:44 PM	PH3 valve closed
6/29/2010	12:21:44 PM	SiCl4 pre valve closed
6/29/2010	12:21:44 PM	SiCl4 post valve closed
6/29/2010	12:21:44 PM	Main Vac valve closed
6/29/2010	12:21:44 PM	Bubbler valve closed
6/29/2010	12:21:44 PM	Bypass valve opened
6/29/2010	12:21:44 PM	Helium MFC set to  0.000000
6/29/2010	12:21:44 PM	H2 MFC set to  0.000000
6/29/2010	12:21:44 PM	BCl3 MFC set to  0.000000
6/29/2010	12:21:44 PM	PHl3 MFC set to  0.000000
6/29/2010	12:21:44 PM	SiCl4 MFC set to  0.000000
6/29/2010	12:21:44 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	12:21:44 PM	Tube furnace set to 0
6/29/2010	12:22:33 PM	Helium valve closed
6/29/2010	12:22:33 PM	H2 valve closed
6/29/2010	12:22:33 PM	BCl3 valve closed
6/29/2010	12:22:33 PM	PH3 valve closed
6/29/2010	12:22:33 PM	SiCl4 pre valve closed
6/29/2010	12:22:33 PM	SiCl4 post valve closed
6/29/2010	12:22:33 PM	Bubbler valve closed
6/29/2010	12:22:33 PM	Main Vac valve opened
6/29/2010	12:22:33 PM	Bypass valve opened
6/29/2010	12:22:33 PM	Helium MFC set to  0.000000
6/29/2010	12:22:33 PM	H2 MFC set to  0.000000
6/29/2010	12:22:33 PM	BCl3 MFC set to  0.000000
6/29/2010	12:22:33 PM	PHl3 MFC set to  0.000000
6/29/2010	12:22:33 PM	SiCl4 MFC set to  0.000000
6/29/2010	12:22:33 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	12:22:33 PM	Tube furnace set to 0
6/29/2010	12:22:34 PM	Run finished at 12:22 PM
6/29/2010	12:22:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2010	12:23:18 PM	Recipe started at 12:23 PM
6/29/2010	12:23:18 PM	Helium valve closed
6/29/2010	12:23:18 PM	H2 valve closed
6/29/2010	12:23:18 PM	BCl3 valve closed
6/29/2010	12:23:18 PM	PH3 valve closed
6/29/2010	12:23:18 PM	SiCl4 pre valve closed
6/29/2010	12:23:18 PM	SiCl4 post valve closed
6/29/2010	12:23:18 PM	Main Vac valve closed
6/29/2010	12:23:18 PM	Bubbler valve closed
6/29/2010	12:23:18 PM	Bypass valve opened
6/29/2010	12:23:18 PM	Helium MFC set to  0.000000
6/29/2010	12:23:18 PM	H2 MFC set to  0.000000
6/29/2010	12:23:18 PM	BCl3 MFC set to  0.000000
6/29/2010	12:23:18 PM	PHl3 MFC set to  0.000000
6/29/2010	12:23:18 PM	SiCl4 MFC set to  0.000000
6/29/2010	12:23:18 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	12:23:18 PM	Tube furnace set to 0
6/29/2010	12:23:19 PM	Helium valve closed
6/29/2010	12:23:19 PM	H2 valve closed
6/29/2010	12:23:19 PM	BCl3 valve closed
6/29/2010	12:23:19 PM	PH3 valve closed
6/29/2010	12:23:19 PM	SiCl4 pre valve closed
6/29/2010	12:23:19 PM	SiCl4 post valve closed
6/29/2010	12:23:19 PM	Bubbler valve closed
6/29/2010	12:23:19 PM	Main Vac valve opened
6/29/2010	12:23:19 PM	Bypass valve opened
6/29/2010	12:23:19 PM	Helium MFC set to  0.000000
6/29/2010	12:23:19 PM	H2 MFC set to  0.000000
6/29/2010	12:23:19 PM	BCl3 MFC set to  0.000000
6/29/2010	12:23:19 PM	PHl3 MFC set to  0.000000
6/29/2010	12:23:19 PM	SiCl4 MFC set to  0.000000
6/29/2010	12:23:19 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	12:23:19 PM	Tube furnace set to 0
6/29/2010	12:24:19 PM	H2 valve closed
6/29/2010	12:24:19 PM	BCl3 valve closed
6/29/2010	12:24:19 PM	PH3 valve closed
6/29/2010	12:24:19 PM	SiCl4 pre valve closed
6/29/2010	12:24:19 PM	SiCl4 post valve closed
6/29/2010	12:24:19 PM	Bubbler valve closed
6/29/2010	12:24:19 PM	Helium valve opened
6/29/2010	12:24:19 PM	Main Vac valve opened
6/29/2010	12:24:19 PM	Bypass valve opened
6/29/2010	12:24:19 PM	Helium MFC set to  100.000000
6/29/2010	12:24:19 PM	H2 MFC set to  0.000000
6/29/2010	12:24:19 PM	BCl3 MFC set to  0.000000
6/29/2010	12:24:19 PM	PHl3 MFC set to  0.000000
6/29/2010	12:24:19 PM	SiCl4 MFC set to  0.000000
6/29/2010	12:24:19 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	12:24:19 PM	Tube furnace set to 0
6/29/2010	12:33:19 PM	Helium valve closed
6/29/2010	12:33:19 PM	H2 valve closed
6/29/2010	12:33:19 PM	BCl3 valve closed
6/29/2010	12:33:19 PM	PH3 valve closed
6/29/2010	12:33:19 PM	SiCl4 pre valve closed
6/29/2010	12:33:19 PM	SiCl4 post valve closed
6/29/2010	12:33:19 PM	Bubbler valve closed
6/29/2010	12:33:19 PM	Main Vac valve opened
6/29/2010	12:33:19 PM	Bypass valve opened
6/29/2010	12:33:19 PM	Helium MFC set to  0.000000
6/29/2010	12:33:19 PM	H2 MFC set to  0.000000
6/29/2010	12:33:19 PM	BCl3 MFC set to  0.000000
6/29/2010	12:33:19 PM	PHl3 MFC set to  0.000000
6/29/2010	12:33:19 PM	SiCl4 MFC set to  0.000000
6/29/2010	12:33:19 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	12:33:19 PM	Tube furnace set to 0
6/29/2010	12:34:19 PM	H2 valve closed
6/29/2010	12:34:19 PM	BCl3 valve closed
6/29/2010	12:34:19 PM	PH3 valve closed
6/29/2010	12:34:19 PM	SiCl4 pre valve closed
6/29/2010	12:34:19 PM	SiCl4 post valve closed
6/29/2010	12:34:19 PM	Bubbler valve closed
6/29/2010	12:34:19 PM	Helium valve opened
6/29/2010	12:34:19 PM	Main Vac valve opened
6/29/2010	12:34:19 PM	Bypass valve opened
6/29/2010	12:34:19 PM	Helium MFC set to  100.000000
6/29/2010	12:34:19 PM	H2 MFC set to  0.000000
6/29/2010	12:34:19 PM	BCl3 MFC set to  0.000000
6/29/2010	12:34:19 PM	PHl3 MFC set to  0.000000
6/29/2010	12:34:19 PM	SiCl4 MFC set to  0.000000
6/29/2010	12:34:19 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	12:34:19 PM	Tube furnace set to 0
6/29/2010	12:43:19 PM	Helium valve closed
6/29/2010	12:43:19 PM	H2 valve closed
6/29/2010	12:43:19 PM	BCl3 valve closed
6/29/2010	12:43:19 PM	PH3 valve closed
6/29/2010	12:43:19 PM	SiCl4 pre valve closed
6/29/2010	12:43:19 PM	SiCl4 post valve closed
6/29/2010	12:43:19 PM	Bubbler valve closed
6/29/2010	12:43:19 PM	Main Vac valve opened
6/29/2010	12:43:19 PM	Bypass valve opened
6/29/2010	12:43:19 PM	Helium MFC set to  0.000000
6/29/2010	12:43:19 PM	H2 MFC set to  0.000000
6/29/2010	12:43:19 PM	BCl3 MFC set to  0.000000
6/29/2010	12:43:19 PM	PHl3 MFC set to  0.000000
6/29/2010	12:43:19 PM	SiCl4 MFC set to  0.000000
6/29/2010	12:43:19 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	12:43:20 PM	Tube furnace set to 0
6/29/2010	12:44:20 PM	H2 valve closed
6/29/2010	12:44:20 PM	BCl3 valve closed
6/29/2010	12:44:20 PM	PH3 valve closed
6/29/2010	12:44:20 PM	SiCl4 pre valve closed
6/29/2010	12:44:20 PM	SiCl4 post valve closed
6/29/2010	12:44:20 PM	Bubbler valve closed
6/29/2010	12:44:20 PM	Helium valve opened
6/29/2010	12:44:20 PM	Main Vac valve opened
6/29/2010	12:44:20 PM	Bypass valve opened
6/29/2010	12:44:20 PM	Helium MFC set to  100.000000
6/29/2010	12:44:20 PM	H2 MFC set to  0.000000
6/29/2010	12:44:20 PM	BCl3 MFC set to  0.000000
6/29/2010	12:44:20 PM	PHl3 MFC set to  0.000000
6/29/2010	12:44:20 PM	SiCl4 MFC set to  0.000000
6/29/2010	12:44:20 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	12:44:20 PM	Tube furnace set to 0
6/29/2010	12:53:20 PM	Helium valve closed
6/29/2010	12:53:20 PM	H2 valve closed
6/29/2010	12:53:20 PM	BCl3 valve closed
6/29/2010	12:53:20 PM	PH3 valve closed
6/29/2010	12:53:20 PM	SiCl4 pre valve closed
6/29/2010	12:53:20 PM	SiCl4 post valve closed
6/29/2010	12:53:20 PM	Bubbler valve closed
6/29/2010	12:53:20 PM	Main Vac valve opened
6/29/2010	12:53:20 PM	Bypass valve opened
6/29/2010	12:53:20 PM	Helium MFC set to  0.000000
6/29/2010	12:53:20 PM	H2 MFC set to  0.000000
6/29/2010	12:53:20 PM	BCl3 MFC set to  0.000000
6/29/2010	12:53:20 PM	PHl3 MFC set to  0.000000
6/29/2010	12:53:20 PM	SiCl4 MFC set to  0.000000
6/29/2010	12:53:20 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	12:53:20 PM	Tube furnace set to 0
6/29/2010	12:53:21 PM	Run finished at 12:53 PM
6/29/2010	1:39:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/29/2010	1:39:53 PM	Recipe started at 1:39 PM
6/29/2010	1:39:53 PM	Helium valve closed
6/29/2010	1:39:53 PM	H2 valve closed
6/29/2010	1:39:53 PM	BCl3 valve closed
6/29/2010	1:39:53 PM	PH3 valve closed
6/29/2010	1:39:53 PM	SiCl4 pre valve closed
6/29/2010	1:39:53 PM	SiCl4 post valve closed
6/29/2010	1:39:53 PM	Main Vac valve closed
6/29/2010	1:39:53 PM	Bypass valve closed
6/29/2010	1:39:53 PM	Bubbler valve closed
6/29/2010	1:39:53 PM	Helium MFC set to  0.000000
6/29/2010	1:39:53 PM	H2 MFC set to  0.000000
6/29/2010	1:39:53 PM	BCl3 MFC set to  0.000000
6/29/2010	1:39:53 PM	PHl3 MFC set to  0.000000
6/29/2010	1:39:53 PM	SiCl4 MFC set to  0.000000
6/29/2010	1:39:53 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	1:39:53 PM	Tube furnace set to 0
6/29/2010	1:39:53 PM	Run finished at 1:39 PM
6/29/2010	1:39:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/29/2010	1:40:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2010	1:40:04 PM	Recipe started at 1:40 PM
6/29/2010	1:40:04 PM	Helium valve closed
6/29/2010	1:40:04 PM	H2 valve closed
6/29/2010	1:40:04 PM	BCl3 valve closed
6/29/2010	1:40:04 PM	PH3 valve closed
6/29/2010	1:40:04 PM	SiCl4 pre valve closed
6/29/2010	1:40:04 PM	SiCl4 post valve closed
6/29/2010	1:40:04 PM	Main Vac valve closed
6/29/2010	1:40:04 PM	Bubbler valve closed
6/29/2010	1:40:04 PM	Bypass valve opened
6/29/2010	1:40:04 PM	Helium MFC set to  0.000000
6/29/2010	1:40:04 PM	H2 MFC set to  0.000000
6/29/2010	1:40:04 PM	BCl3 MFC set to  0.000000
6/29/2010	1:40:04 PM	PHl3 MFC set to  0.000000
6/29/2010	1:40:04 PM	SiCl4 MFC set to  0.000000
6/29/2010	1:40:04 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	1:40:04 PM	Tube furnace set to 0
6/29/2010	1:40:05 PM	Helium valve closed
6/29/2010	1:40:05 PM	H2 valve closed
6/29/2010	1:40:05 PM	BCl3 valve closed
6/29/2010	1:40:05 PM	PH3 valve closed
6/29/2010	1:40:05 PM	SiCl4 pre valve closed
6/29/2010	1:40:05 PM	SiCl4 post valve closed
6/29/2010	1:40:05 PM	Bubbler valve closed
6/29/2010	1:40:05 PM	Main Vac valve opened
6/29/2010	1:40:05 PM	Bypass valve opened
6/29/2010	1:40:05 PM	Helium MFC set to  0.000000
6/29/2010	1:40:05 PM	H2 MFC set to  0.000000
6/29/2010	1:40:05 PM	BCl3 MFC set to  0.000000
6/29/2010	1:40:05 PM	PHl3 MFC set to  0.000000
6/29/2010	1:40:05 PM	SiCl4 MFC set to  0.000000
6/29/2010	1:40:05 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	1:40:05 PM	Tube furnace set to 0
6/29/2010	1:40:05 PM	Run finished at 1:40 PM
6/29/2010	1:40:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2010	1:52:24 PM	Recipe started at 1:52 PM
6/29/2010	1:52:24 PM	Helium valve closed
6/29/2010	1:52:24 PM	BCl3 valve closed
6/29/2010	1:52:24 PM	PH3 valve closed
6/29/2010	1:52:24 PM	SiCl4 pre valve closed
6/29/2010	1:52:24 PM	SiCl4 post valve closed
6/29/2010	1:52:24 PM	Main Vac valve closed
6/29/2010	1:52:24 PM	Bypass valve closed
6/29/2010	1:52:24 PM	Bubbler valve closed
6/29/2010	1:52:24 PM	H2 valve opened
6/29/2010	1:52:24 PM	Helium MFC set to  0.000000
6/29/2010	1:52:24 PM	H2 MFC set to  500.000000
6/29/2010	1:52:24 PM	BCl3 MFC set to  0.000000
6/29/2010	1:52:24 PM	PHl3 MFC set to  0.000000
6/29/2010	1:52:24 PM	SiCl4 MFC set to  0.000000
6/29/2010	1:52:24 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	1:52:24 PM	Tube furnace set to 0
6/29/2010	1:53:44 PM	Helium valve closed
6/29/2010	1:53:44 PM	BCl3 valve closed
6/29/2010	1:53:44 PM	PH3 valve closed
6/29/2010	1:53:44 PM	SiCl4 pre valve closed
6/29/2010	1:53:44 PM	SiCl4 post valve closed
6/29/2010	1:53:44 PM	Main Vac valve closed
6/29/2010	1:53:44 PM	Bypass valve closed
6/29/2010	1:53:44 PM	H2 valve opened
6/29/2010	1:53:44 PM	Bubbler valve opened
6/29/2010	1:53:44 PM	Helium MFC set to  0.000000
6/29/2010	1:53:44 PM	H2 MFC set to  500.000000
6/29/2010	1:53:44 PM	BCl3 MFC set to  0.000000
6/29/2010	1:53:44 PM	PHl3 MFC set to  0.000000
6/29/2010	1:53:44 PM	SiCl4 MFC set to  0.000000
6/29/2010	1:53:44 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	1:53:44 PM	Tube furnace set to 1000
6/29/2010	2:13:44 PM	Helium valve closed
6/29/2010	2:13:44 PM	PH3 valve closed
6/29/2010	2:13:44 PM	Main Vac valve closed
6/29/2010	2:13:44 PM	Bypass valve closed
6/29/2010	2:13:44 PM	H2 valve opened
6/29/2010	2:13:44 PM	BCl3 valve opened
6/29/2010	2:13:44 PM	SiCl4 pre valve opened
6/29/2010	2:13:44 PM	SiCl4 post valve opened
6/29/2010	2:13:44 PM	Bubbler valve opened
6/29/2010	2:13:44 PM	Helium MFC set to  0.000000
6/29/2010	2:13:44 PM	H2 MFC set to  500.000000
6/29/2010	2:13:44 PM	BCl3 MFC set to  12.000000
6/29/2010	2:13:44 PM	PHl3 MFC set to  0.000000
6/29/2010	2:13:44 PM	SiCl4 MFC set to  50.000000
6/29/2010	2:13:44 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	2:13:44 PM	Tube furnace set to 1000
6/29/2010	2:28:44 PM	H2 valve closed
6/29/2010	2:28:44 PM	BCl3 valve closed
6/29/2010	2:28:44 PM	PH3 valve closed
6/29/2010	2:28:44 PM	SiCl4 pre valve closed
6/29/2010	2:28:44 PM	SiCl4 post valve closed
6/29/2010	2:28:44 PM	Main Vac valve closed
6/29/2010	2:28:44 PM	Bypass valve closed
6/29/2010	2:28:44 PM	Helium valve opened
6/29/2010	2:28:44 PM	Bubbler valve opened
6/29/2010	2:28:44 PM	Helium MFC set to  500.000000
6/29/2010	2:28:44 PM	H2 MFC set to  0.000000
6/29/2010	2:28:44 PM	BCl3 MFC set to  0.000000
6/29/2010	2:28:44 PM	PHl3 MFC set to  0.000000
6/29/2010	2:28:44 PM	SiCl4 MFC set to  0.000000
6/29/2010	2:28:44 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	2:28:45 PM	Tube furnace set to 0
6/29/2010	2:48:45 PM	Helium valve closed
6/29/2010	2:48:45 PM	H2 valve closed
6/29/2010	2:48:45 PM	BCl3 valve closed
6/29/2010	2:48:45 PM	PH3 valve closed
6/29/2010	2:48:45 PM	SiCl4 pre valve closed
6/29/2010	2:48:45 PM	SiCl4 post valve closed
6/29/2010	2:48:45 PM	Main Vac valve closed
6/29/2010	2:48:45 PM	Bypass valve closed
6/29/2010	2:48:45 PM	Bubbler valve closed
6/29/2010	2:48:45 PM	Helium MFC set to  0.000000
6/29/2010	2:48:45 PM	H2 MFC set to  0.000000
6/29/2010	2:48:45 PM	BCl3 MFC set to  0.000000
6/29/2010	2:48:45 PM	PHl3 MFC set to  0.000000
6/29/2010	2:48:45 PM	SiCl4 MFC set to  0.000000
6/29/2010	2:48:45 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	2:48:45 PM	Tube furnace set to 0
6/29/2010	2:48:45 PM	Run finished at 2:48 PM
6/29/2010	3:03:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2010	3:03:52 PM	Recipe started at 3:03 PM
6/29/2010	3:03:52 PM	H2 valve closed
6/29/2010	3:03:52 PM	BCl3 valve closed
6/29/2010	3:03:52 PM	PH3 valve closed
6/29/2010	3:03:52 PM	SiCl4 pre valve closed
6/29/2010	3:03:52 PM	SiCl4 post valve closed
6/29/2010	3:03:52 PM	Main Vac valve closed
6/29/2010	3:03:52 PM	Bypass valve closed
6/29/2010	3:03:52 PM	Bubbler valve closed
6/29/2010	3:03:52 PM	Helium valve opened
6/29/2010	3:03:52 PM	Helium MFC set to  500.000000
6/29/2010	3:03:52 PM	H2 MFC set to  0.000000
6/29/2010	3:03:52 PM	BCl3 MFC set to  0.000000
6/29/2010	3:03:52 PM	PHl3 MFC set to  0.000000
6/29/2010	3:03:52 PM	SiCl4 MFC set to  0.000000
6/29/2010	3:03:52 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	3:03:53 PM	Tube furnace set to 0
6/29/2010	3:03:57 PM	Helium valve closed
6/29/2010	3:03:57 PM	H2 valve closed
6/29/2010	3:03:57 PM	BCl3 valve closed
6/29/2010	3:03:57 PM	PH3 valve closed
6/29/2010	3:03:57 PM	SiCl4 pre valve closed
6/29/2010	3:03:57 PM	SiCl4 post valve closed
6/29/2010	3:03:57 PM	Main Vac valve closed
6/29/2010	3:03:57 PM	Bypass valve closed
6/29/2010	3:03:57 PM	Bubbler valve closed
6/29/2010	3:03:57 PM	Helium MFC set to  0.000000
6/29/2010	3:03:57 PM	H2 MFC set to  0.000000
6/29/2010	3:03:57 PM	BCl3 MFC set to  0.000000
6/29/2010	3:03:57 PM	PHl3 MFC set to  0.000000
6/29/2010	3:03:57 PM	SiCl4 MFC set to  0.000000
6/29/2010	3:03:57 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	3:03:57 PM	Tube furnace set to 0
6/29/2010	3:03:58 PM	Run finished at 3:03 PM
6/29/2010	3:03:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2010	3:20:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2010	3:20:42 PM	Recipe started at 3:20 PM
6/29/2010	3:20:42 PM	Helium valve closed
6/29/2010	3:20:42 PM	H2 valve closed
6/29/2010	3:20:42 PM	BCl3 valve closed
6/29/2010	3:20:42 PM	PH3 valve closed
6/29/2010	3:20:42 PM	SiCl4 pre valve closed
6/29/2010	3:20:42 PM	SiCl4 post valve closed
6/29/2010	3:20:42 PM	Main Vac valve closed
6/29/2010	3:20:42 PM	Bubbler valve closed
6/29/2010	3:20:42 PM	Bypass valve opened
6/29/2010	3:20:42 PM	Helium MFC set to  0.000000
6/29/2010	3:20:42 PM	H2 MFC set to  0.000000
6/29/2010	3:20:42 PM	BCl3 MFC set to  0.000000
6/29/2010	3:20:42 PM	PHl3 MFC set to  0.000000
6/29/2010	3:20:42 PM	SiCl4 MFC set to  0.000000
6/29/2010	3:20:42 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	3:20:42 PM	Tube furnace set to 0
6/29/2010	3:21:30 PM	Helium valve closed
6/29/2010	3:21:30 PM	H2 valve closed
6/29/2010	3:21:31 PM	BCl3 valve closed
6/29/2010	3:21:31 PM	PH3 valve closed
6/29/2010	3:21:31 PM	SiCl4 pre valve closed
6/29/2010	3:21:31 PM	SiCl4 post valve closed
6/29/2010	3:21:31 PM	Bubbler valve closed
6/29/2010	3:21:31 PM	Main Vac valve opened
6/29/2010	3:21:31 PM	Bypass valve opened
6/29/2010	3:21:31 PM	Helium MFC set to  0.000000
6/29/2010	3:21:31 PM	H2 MFC set to  0.000000
6/29/2010	3:21:31 PM	BCl3 MFC set to  0.000000
6/29/2010	3:21:31 PM	PHl3 MFC set to  0.000000
6/29/2010	3:21:31 PM	SiCl4 MFC set to  0.000000
6/29/2010	3:21:31 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	3:21:31 PM	Tube furnace set to 0
6/29/2010	3:21:31 PM	Run finished at 3:21 PM
6/29/2010	3:21:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2010	3:27:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2010	3:27:01 PM	Recipe started at 3:27 PM
6/29/2010	3:27:01 PM	H2 valve closed
6/29/2010	3:27:01 PM	BCl3 valve closed
6/29/2010	3:27:01 PM	PH3 valve closed
6/29/2010	3:27:01 PM	SiCl4 pre valve closed
6/29/2010	3:27:01 PM	SiCl4 post valve closed
6/29/2010	3:27:01 PM	Main Vac valve closed
6/29/2010	3:27:01 PM	Bypass valve closed
6/29/2010	3:27:01 PM	Bubbler valve closed
6/29/2010	3:27:01 PM	Helium valve opened
6/29/2010	3:27:01 PM	Helium MFC set to  500.000000
6/29/2010	3:27:01 PM	H2 MFC set to  0.000000
6/29/2010	3:27:01 PM	BCl3 MFC set to  0.000000
6/29/2010	3:27:01 PM	PHl3 MFC set to  0.000000
6/29/2010	3:27:01 PM	SiCl4 MFC set to  0.000000
6/29/2010	3:27:01 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	3:27:01 PM	Tube furnace set to 0
6/29/2010	3:28:20 PM	Helium valve closed
6/29/2010	3:28:20 PM	H2 valve closed
6/29/2010	3:28:20 PM	BCl3 valve closed
6/29/2010	3:28:20 PM	PH3 valve closed
6/29/2010	3:28:20 PM	SiCl4 pre valve closed
6/29/2010	3:28:20 PM	SiCl4 post valve closed
6/29/2010	3:28:20 PM	Main Vac valve closed
6/29/2010	3:28:20 PM	Bypass valve closed
6/29/2010	3:28:20 PM	Bubbler valve closed
6/29/2010	3:28:20 PM	Helium MFC set to  0.000000
6/29/2010	3:28:20 PM	H2 MFC set to  0.000000
6/29/2010	3:28:20 PM	BCl3 MFC set to  0.000000
6/29/2010	3:28:20 PM	PHl3 MFC set to  0.000000
6/29/2010	3:28:20 PM	SiCl4 MFC set to  0.000000
6/29/2010	3:28:20 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	3:28:20 PM	Tube furnace set to 0
6/29/2010	3:28:20 PM	Run finished at 3:28 PM
6/29/2010	3:28:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2010	3:34:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2010	3:34:40 PM	Recipe started at 3:34 PM
6/29/2010	3:34:40 PM	Helium valve closed
6/29/2010	3:34:40 PM	H2 valve closed
6/29/2010	3:34:40 PM	BCl3 valve closed
6/29/2010	3:34:40 PM	PH3 valve closed
6/29/2010	3:34:40 PM	SiCl4 pre valve closed
6/29/2010	3:34:40 PM	SiCl4 post valve closed
6/29/2010	3:34:40 PM	Main Vac valve closed
6/29/2010	3:34:40 PM	Bubbler valve closed
6/29/2010	3:34:40 PM	Bypass valve opened
6/29/2010	3:34:40 PM	Helium MFC set to  0.000000
6/29/2010	3:34:40 PM	H2 MFC set to  0.000000
6/29/2010	3:34:40 PM	BCl3 MFC set to  0.000000
6/29/2010	3:34:40 PM	PHl3 MFC set to  0.000000
6/29/2010	3:34:40 PM	SiCl4 MFC set to  0.000000
6/29/2010	3:34:40 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	3:34:41 PM	Tube furnace set to 0
6/29/2010	3:35:28 PM	Helium valve closed
6/29/2010	3:35:28 PM	H2 valve closed
6/29/2010	3:35:28 PM	BCl3 valve closed
6/29/2010	3:35:28 PM	PH3 valve closed
6/29/2010	3:35:28 PM	SiCl4 pre valve closed
6/29/2010	3:35:28 PM	SiCl4 post valve closed
6/29/2010	3:35:28 PM	Bubbler valve closed
6/29/2010	3:35:28 PM	Main Vac valve opened
6/29/2010	3:35:28 PM	Bypass valve opened
6/29/2010	3:35:28 PM	Helium MFC set to  0.000000
6/29/2010	3:35:28 PM	H2 MFC set to  0.000000
6/29/2010	3:35:28 PM	BCl3 MFC set to  0.000000
6/29/2010	3:35:28 PM	PHl3 MFC set to  0.000000
6/29/2010	3:35:28 PM	SiCl4 MFC set to  0.000000
6/29/2010	3:35:28 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	3:35:28 PM	Tube furnace set to 0
6/29/2010	3:35:28 PM	Run finished at 3:35 PM
6/29/2010	3:35:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2010	4:36:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2010	4:36:59 PM	Recipe started at 4:36 PM
6/29/2010	4:36:59 PM	H2 valve closed
6/29/2010	4:36:59 PM	BCl3 valve closed
6/29/2010	4:36:59 PM	PH3 valve closed
6/29/2010	4:36:59 PM	SiCl4 pre valve closed
6/29/2010	4:36:59 PM	SiCl4 post valve closed
6/29/2010	4:36:59 PM	Main Vac valve closed
6/29/2010	4:36:59 PM	Bypass valve closed
6/29/2010	4:36:59 PM	Bubbler valve closed
6/29/2010	4:36:59 PM	Helium valve opened
6/29/2010	4:36:59 PM	Helium MFC set to  500.000000
6/29/2010	4:36:59 PM	H2 MFC set to  0.000000
6/29/2010	4:36:59 PM	BCl3 MFC set to  0.000000
6/29/2010	4:36:59 PM	PHl3 MFC set to  0.000000
6/29/2010	4:36:59 PM	SiCl4 MFC set to  0.000000
6/29/2010	4:36:59 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	4:36:59 PM	Tube furnace set to 0
6/29/2010	4:38:18 PM	Helium valve closed
6/29/2010	4:38:18 PM	H2 valve closed
6/29/2010	4:38:18 PM	BCl3 valve closed
6/29/2010	4:38:18 PM	PH3 valve closed
6/29/2010	4:38:18 PM	SiCl4 pre valve closed
6/29/2010	4:38:18 PM	SiCl4 post valve closed
6/29/2010	4:38:18 PM	Main Vac valve closed
6/29/2010	4:38:18 PM	Bypass valve closed
6/29/2010	4:38:18 PM	Bubbler valve closed
6/29/2010	4:38:18 PM	Helium MFC set to  0.000000
6/29/2010	4:38:18 PM	H2 MFC set to  0.000000
6/29/2010	4:38:18 PM	BCl3 MFC set to  0.000000
6/29/2010	4:38:18 PM	PHl3 MFC set to  0.000000
6/29/2010	4:38:18 PM	SiCl4 MFC set to  0.000000
6/29/2010	4:38:18 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	4:38:18 PM	Tube furnace set to 0
6/29/2010	4:38:18 PM	Run finished at 4:38 PM
6/29/2010	4:38:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2010	4:43:53 PM	Recipe started at 4:43 PM
6/29/2010	4:43:53 PM	Helium valve closed
6/29/2010	4:43:53 PM	H2 valve closed
6/29/2010	4:43:53 PM	BCl3 valve closed
6/29/2010	4:43:53 PM	PH3 valve closed
6/29/2010	4:43:53 PM	SiCl4 pre valve closed
6/29/2010	4:43:53 PM	SiCl4 post valve closed
6/29/2010	4:43:53 PM	Main Vac valve closed
6/29/2010	4:43:53 PM	Bubbler valve closed
6/29/2010	4:43:53 PM	Bypass valve opened
6/29/2010	4:43:53 PM	Helium MFC set to  0.000000
6/29/2010	4:43:53 PM	H2 MFC set to  0.000000
6/29/2010	4:43:53 PM	BCl3 MFC set to  0.000000
6/29/2010	4:43:53 PM	PHl3 MFC set to  0.000000
6/29/2010	4:43:53 PM	SiCl4 MFC set to  0.000000
6/29/2010	4:43:53 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	4:43:53 PM	Tube furnace set to 0
6/29/2010	4:44:41 PM	Helium valve closed
6/29/2010	4:44:41 PM	H2 valve closed
6/29/2010	4:44:41 PM	BCl3 valve closed
6/29/2010	4:44:41 PM	PH3 valve closed
6/29/2010	4:44:41 PM	SiCl4 pre valve closed
6/29/2010	4:44:41 PM	SiCl4 post valve closed
6/29/2010	4:44:41 PM	Bubbler valve closed
6/29/2010	4:44:41 PM	Main Vac valve opened
6/29/2010	4:44:41 PM	Bypass valve opened
6/29/2010	4:44:41 PM	Helium MFC set to  0.000000
6/29/2010	4:44:41 PM	H2 MFC set to  0.000000
6/29/2010	4:44:41 PM	BCl3 MFC set to  0.000000
6/29/2010	4:44:41 PM	PHl3 MFC set to  0.000000
6/29/2010	4:44:41 PM	SiCl4 MFC set to  0.000000
6/29/2010	4:44:41 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	4:44:41 PM	Tube furnace set to 0
6/29/2010	4:45:41 PM	H2 valve closed
6/29/2010	4:45:41 PM	BCl3 valve closed
6/29/2010	4:45:41 PM	PH3 valve closed
6/29/2010	4:45:41 PM	SiCl4 pre valve closed
6/29/2010	4:45:41 PM	SiCl4 post valve closed
6/29/2010	4:45:41 PM	Bubbler valve closed
6/29/2010	4:45:41 PM	Helium valve opened
6/29/2010	4:45:41 PM	Main Vac valve opened
6/29/2010	4:45:41 PM	Bypass valve opened
6/29/2010	4:45:41 PM	Helium MFC set to  100.000000
6/29/2010	4:45:41 PM	H2 MFC set to  0.000000
6/29/2010	4:45:41 PM	BCl3 MFC set to  0.000000
6/29/2010	4:45:41 PM	PHl3 MFC set to  0.000000
6/29/2010	4:45:41 PM	SiCl4 MFC set to  0.000000
6/29/2010	4:45:41 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	4:45:41 PM	Tube furnace set to 0
6/29/2010	4:54:41 PM	Helium valve closed
6/29/2010	4:54:41 PM	H2 valve closed
6/29/2010	4:54:41 PM	BCl3 valve closed
6/29/2010	4:54:41 PM	PH3 valve closed
6/29/2010	4:54:41 PM	SiCl4 pre valve closed
6/29/2010	4:54:41 PM	SiCl4 post valve closed
6/29/2010	4:54:41 PM	Bubbler valve closed
6/29/2010	4:54:41 PM	Main Vac valve opened
6/29/2010	4:54:41 PM	Bypass valve opened
6/29/2010	4:54:41 PM	Helium MFC set to  0.000000
6/29/2010	4:54:41 PM	H2 MFC set to  0.000000
6/29/2010	4:54:41 PM	BCl3 MFC set to  0.000000
6/29/2010	4:54:41 PM	PHl3 MFC set to  0.000000
6/29/2010	4:54:41 PM	SiCl4 MFC set to  0.000000
6/29/2010	4:54:41 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	4:54:41 PM	Tube furnace set to 0
6/29/2010	4:55:41 PM	H2 valve closed
6/29/2010	4:55:41 PM	BCl3 valve closed
6/29/2010	4:55:41 PM	PH3 valve closed
6/29/2010	4:55:41 PM	SiCl4 pre valve closed
6/29/2010	4:55:41 PM	SiCl4 post valve closed
6/29/2010	4:55:41 PM	Bubbler valve closed
6/29/2010	4:55:41 PM	Helium valve opened
6/29/2010	4:55:41 PM	Main Vac valve opened
6/29/2010	4:55:41 PM	Bypass valve opened
6/29/2010	4:55:41 PM	Helium MFC set to  100.000000
6/29/2010	4:55:41 PM	H2 MFC set to  0.000000
6/29/2010	4:55:41 PM	BCl3 MFC set to  0.000000
6/29/2010	4:55:41 PM	PHl3 MFC set to  0.000000
6/29/2010	4:55:41 PM	SiCl4 MFC set to  0.000000
6/29/2010	4:55:41 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	4:55:42 PM	Tube furnace set to 0
6/29/2010	5:04:42 PM	Helium valve closed
6/29/2010	5:04:42 PM	H2 valve closed
6/29/2010	5:04:42 PM	BCl3 valve closed
6/29/2010	5:04:42 PM	PH3 valve closed
6/29/2010	5:04:42 PM	SiCl4 pre valve closed
6/29/2010	5:04:42 PM	SiCl4 post valve closed
6/29/2010	5:04:42 PM	Bubbler valve closed
6/29/2010	5:04:42 PM	Main Vac valve opened
6/29/2010	5:04:42 PM	Bypass valve opened
6/29/2010	5:04:42 PM	Helium MFC set to  0.000000
6/29/2010	5:04:42 PM	H2 MFC set to  0.000000
6/29/2010	5:04:42 PM	BCl3 MFC set to  0.000000
6/29/2010	5:04:42 PM	PHl3 MFC set to  0.000000
6/29/2010	5:04:42 PM	SiCl4 MFC set to  0.000000
6/29/2010	5:04:42 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	5:04:42 PM	Tube furnace set to 0
6/29/2010	5:05:42 PM	H2 valve closed
6/29/2010	5:05:42 PM	BCl3 valve closed
6/29/2010	5:05:42 PM	PH3 valve closed
6/29/2010	5:05:42 PM	SiCl4 pre valve closed
6/29/2010	5:05:42 PM	SiCl4 post valve closed
6/29/2010	5:05:42 PM	Bubbler valve closed
6/29/2010	5:05:42 PM	Helium valve opened
6/29/2010	5:05:42 PM	Main Vac valve opened
6/29/2010	5:05:42 PM	Bypass valve opened
6/29/2010	5:05:42 PM	Helium MFC set to  100.000000
6/29/2010	5:05:42 PM	H2 MFC set to  0.000000
6/29/2010	5:05:42 PM	BCl3 MFC set to  0.000000
6/29/2010	5:05:42 PM	PHl3 MFC set to  0.000000
6/29/2010	5:05:42 PM	SiCl4 MFC set to  0.000000
6/29/2010	5:05:42 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	5:05:42 PM	Tube furnace set to 0
6/29/2010	5:14:42 PM	Helium valve closed
6/29/2010	5:14:42 PM	H2 valve closed
6/29/2010	5:14:42 PM	BCl3 valve closed
6/29/2010	5:14:42 PM	PH3 valve closed
6/29/2010	5:14:42 PM	SiCl4 pre valve closed
6/29/2010	5:14:42 PM	SiCl4 post valve closed
6/29/2010	5:14:42 PM	Bubbler valve closed
6/29/2010	5:14:42 PM	Main Vac valve opened
6/29/2010	5:14:42 PM	Bypass valve opened
6/29/2010	5:14:42 PM	Helium MFC set to  0.000000
6/29/2010	5:14:42 PM	H2 MFC set to  0.000000
6/29/2010	5:14:42 PM	BCl3 MFC set to  0.000000
6/29/2010	5:14:42 PM	PHl3 MFC set to  0.000000
6/29/2010	5:14:42 PM	SiCl4 MFC set to  0.000000
6/29/2010	5:14:42 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	5:14:42 PM	Tube furnace set to 0
6/29/2010	5:14:43 PM	Run finished at 5:14 PM
6/29/2010	7:55:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/29/2010	7:55:05 PM	Recipe started at 7:55 PM
6/29/2010	7:55:05 PM	Helium valve closed
6/29/2010	7:55:05 PM	H2 valve closed
6/29/2010	7:55:05 PM	BCl3 valve closed
6/29/2010	7:55:05 PM	PH3 valve closed
6/29/2010	7:55:05 PM	SiCl4 pre valve closed
6/29/2010	7:55:05 PM	SiCl4 post valve closed
6/29/2010	7:55:05 PM	Main Vac valve closed
6/29/2010	7:55:05 PM	Bypass valve closed
6/29/2010	7:55:05 PM	Bubbler valve closed
6/29/2010	7:55:05 PM	Helium MFC set to  0.000000
6/29/2010	7:55:05 PM	H2 MFC set to  0.000000
6/29/2010	7:55:05 PM	BCl3 MFC set to  0.000000
6/29/2010	7:55:05 PM	PHl3 MFC set to  0.000000
6/29/2010	7:55:05 PM	SiCl4 MFC set to  0.000000
6/29/2010	7:55:05 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	7:55:05 PM	Tube furnace set to 0
6/29/2010	7:55:05 PM	Run finished at 7:55 PM
6/29/2010	7:55:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/29/2010	7:55:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2010	7:55:17 PM	Recipe started at 7:55 PM
6/29/2010	7:55:17 PM	Helium valve closed
6/29/2010	7:55:17 PM	H2 valve closed
6/29/2010	7:55:17 PM	BCl3 valve closed
6/29/2010	7:55:17 PM	PH3 valve closed
6/29/2010	7:55:17 PM	SiCl4 pre valve closed
6/29/2010	7:55:17 PM	SiCl4 post valve closed
6/29/2010	7:55:17 PM	Main Vac valve closed
6/29/2010	7:55:17 PM	Bubbler valve closed
6/29/2010	7:55:17 PM	Bypass valve opened
6/29/2010	7:55:17 PM	Helium MFC set to  0.000000
6/29/2010	7:55:17 PM	H2 MFC set to  0.000000
6/29/2010	7:55:17 PM	BCl3 MFC set to  0.000000
6/29/2010	7:55:17 PM	PHl3 MFC set to  0.000000
6/29/2010	7:55:17 PM	SiCl4 MFC set to  0.000000
6/29/2010	7:55:17 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	7:55:18 PM	Tube furnace set to 0
6/29/2010	7:55:18 PM	Helium valve closed
6/29/2010	7:55:18 PM	H2 valve closed
6/29/2010	7:55:18 PM	BCl3 valve closed
6/29/2010	7:55:18 PM	PH3 valve closed
6/29/2010	7:55:18 PM	SiCl4 pre valve closed
6/29/2010	7:55:18 PM	SiCl4 post valve closed
6/29/2010	7:55:18 PM	Bubbler valve closed
6/29/2010	7:55:18 PM	Main Vac valve opened
6/29/2010	7:55:18 PM	Bypass valve opened
6/29/2010	7:55:18 PM	Helium MFC set to  0.000000
6/29/2010	7:55:18 PM	H2 MFC set to  0.000000
6/29/2010	7:55:18 PM	BCl3 MFC set to  0.000000
6/29/2010	7:55:18 PM	PHl3 MFC set to  0.000000
6/29/2010	7:55:18 PM	SiCl4 MFC set to  0.000000
6/29/2010	7:55:18 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	7:55:18 PM	Tube furnace set to 0
6/29/2010	7:55:18 PM	Run finished at 7:55 PM
6/29/2010	7:55:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2010	7:56:46 PM	Recipe started at 7:56 PM
6/29/2010	7:56:46 PM	Helium valve closed
6/29/2010	7:56:46 PM	BCl3 valve closed
6/29/2010	7:56:46 PM	PH3 valve closed
6/29/2010	7:56:46 PM	SiCl4 pre valve closed
6/29/2010	7:56:46 PM	SiCl4 post valve closed
6/29/2010	7:56:46 PM	Main Vac valve closed
6/29/2010	7:56:46 PM	Bypass valve closed
6/29/2010	7:56:46 PM	Bubbler valve closed
6/29/2010	7:56:46 PM	H2 valve opened
6/29/2010	7:56:46 PM	Helium MFC set to  0.000000
6/29/2010	7:56:46 PM	H2 MFC set to  500.000000
6/29/2010	7:56:46 PM	BCl3 MFC set to  0.000000
6/29/2010	7:56:46 PM	PHl3 MFC set to  0.000000
6/29/2010	7:56:46 PM	SiCl4 MFC set to  0.000000
6/29/2010	7:56:46 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	7:56:46 PM	Tube furnace set to 0
6/29/2010	7:58:09 PM	Helium valve closed
6/29/2010	7:58:09 PM	BCl3 valve closed
6/29/2010	7:58:09 PM	PH3 valve closed
6/29/2010	7:58:09 PM	SiCl4 pre valve closed
6/29/2010	7:58:09 PM	SiCl4 post valve closed
6/29/2010	7:58:09 PM	Main Vac valve closed
6/29/2010	7:58:09 PM	Bypass valve closed
6/29/2010	7:58:09 PM	H2 valve opened
6/29/2010	7:58:09 PM	Bubbler valve opened
6/29/2010	7:58:09 PM	Helium MFC set to  0.000000
6/29/2010	7:58:09 PM	H2 MFC set to  500.000000
6/29/2010	7:58:09 PM	BCl3 MFC set to  0.000000
6/29/2010	7:58:09 PM	PHl3 MFC set to  0.000000
6/29/2010	7:58:09 PM	SiCl4 MFC set to  0.000000
6/29/2010	7:58:09 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	7:58:09 PM	Tube furnace set to 1000
6/29/2010	8:18:09 PM	H2 valve closed
6/29/2010	8:18:09 PM	BCl3 valve closed
6/29/2010	8:18:09 PM	PH3 valve closed
6/29/2010	8:18:09 PM	SiCl4 pre valve closed
6/29/2010	8:18:09 PM	SiCl4 post valve closed
6/29/2010	8:18:09 PM	Main Vac valve closed
6/29/2010	8:18:09 PM	Bypass valve closed
6/29/2010	8:18:09 PM	Helium valve opened
6/29/2010	8:18:09 PM	Bubbler valve opened
6/29/2010	8:18:09 PM	Helium MFC set to  500.000000
6/29/2010	8:18:09 PM	H2 MFC set to  0.000000
6/29/2010	8:18:09 PM	BCl3 MFC set to  0.000000
6/29/2010	8:18:09 PM	PHl3 MFC set to  0.000000
6/29/2010	8:18:09 PM	SiCl4 MFC set to  0.000000
6/29/2010	8:18:09 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	8:18:09 PM	Tube furnace set to 0
6/29/2010	8:38:09 PM	Helium valve closed
6/29/2010	8:38:09 PM	H2 valve closed
6/29/2010	8:38:09 PM	BCl3 valve closed
6/29/2010	8:38:09 PM	PH3 valve closed
6/29/2010	8:38:09 PM	SiCl4 pre valve closed
6/29/2010	8:38:09 PM	SiCl4 post valve closed
6/29/2010	8:38:09 PM	Main Vac valve closed
6/29/2010	8:38:09 PM	Bypass valve closed
6/29/2010	8:38:09 PM	Bubbler valve closed
6/29/2010	8:38:09 PM	Helium MFC set to  0.000000
6/29/2010	8:38:09 PM	H2 MFC set to  0.000000
6/29/2010	8:38:09 PM	BCl3 MFC set to  0.000000
6/29/2010	8:38:09 PM	PHl3 MFC set to  0.000000
6/29/2010	8:38:09 PM	SiCl4 MFC set to  0.000000
6/29/2010	8:38:09 PM	Bypass solenoid MFC set to  0.000000
6/29/2010	8:38:09 PM	Tube furnace set to 0
6/29/2010	8:38:09 PM	Run finished at 8:38 PM
